Effect of irradiation parameters on the surface pattern evolution in silicon due to ion bombardment

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Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2010

Author dc:creator

• Das, Kallol

Contributors dc:contributor

• Johnson, Harley T.
• Freund, Jonathan B.

• ion bombardment
• silicon surface pattern
• ion irradiation
• surface diffusion
• molecular dynamics
• ripple patterns
• moment
• crater function

Statement dc:rights

• Copyright 2010 Kallol Das

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/17024

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/17024