Abstract
dc:descriptionThis thesis explores the characterization of infrared (IR) imaging systems by microfabricating and analyzing USAF targets with varying thicknesses (0.6 μm to 5.3 μm) using SU-8 photoresist. The targets were fabricated in a cleanroom environment to ensure controlled conditions and high precision. Designed with well-defined USAF patterns, they served as reliable test samples to assess spectral accuracy and resolution capability due to their tailored and precisely measured parameters. Comparative thickness measurements using surface profilometry (DekTak3ST) and laser confocal microscopy (Keyence VK-X1000) revealed that surface profilometry was more accurate for thin films (< 1 μm) due to challenges in resolving transparent film surfaces via confocal microscopy. High-resolution profiles of USAF targets demonstrated a superior edge quality in laser confocal profiling with 0.08 μm pitch size but were prone to negative artifacts due to the same resolution issue. The Varian 620-IR FTIR imaging system was used to acquire spectra, and 1608 cm⁻¹ peak (aromatic C=C) was analyzed, to evaluate spectral fidelity. While the results followed Beer-Lambert law by showing increasing absorbances for thicker films, thicker films presented baseline linearity challenges. This dataset of well characterized targets provides a strong foundation for validating future IR instrument accuracies as well as IR simulation models.
Degree
thesis:*- Name thesis:degree_name
- M.S.
- Level thesis:degree_level
- Thesis
- Discipline thesis:degree_discipline
- Electrical & Computer Engr
- Grantor
- University of Illinois Urbana-Champaign
- Year dc:date
- 2025
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Ashok, Sandhya
- Contributors dc:contributor
-
- Bhargava, Rohit
Subjects
dc:subject × 7Rights
dc:rights- Statement dc:rights
-
- Copyright 2025 Sandhya Ashok
- Language dc:language
- en, eng
Identifiers
dc:identifier.*- Handle dc:identifier
- https://hdl.handle.net/2142/129634