{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/129634"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/129634","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Characterization of infrared imaging systems","abstract":"Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01","abstract_html":"Submission published under a 24 month embargo labeled &#x27;U of I Access&#x27;, the embargo will last until 2027-05-01","abstract_has_math":false,"creators":["Ashok, Sandhya"],"institution":"University of Illinois Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Electrical & Computer Engr","degree_department":null,"school":null,"contributors":["Bhargava, Rohit"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2025,"date_issued":"2025-05-06","date_published":"2025-05-06","updated_at":"2026-07-22T22:25:05Z","subjects":["Infrared Imaging Systems","Imaging Systems","Characterization","Fabrication","Microfabrication","Fourier Transform Infrared Imaging","FTIR"],"languages":["en","eng"],"rights":["Copyright 2025 Sandhya Ashok"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://hdl.handle.net/2142/129634","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Bhargava, Rohit"]},{"key":"dc:creator","label":"Author","values":["Ashok, Sandhya"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2025-05-06","2025-05"]},{"key":"dc:type","label":"Dc Type","values":["text","Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Infrared Imaging Systems","Imaging Systems","Characterization","Fabrication","Microfabrication","Fourier Transform Infrared Imaging","FTIR"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en","eng"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2025 Sandhya Ashok"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://hdl.handle.net/2142/129634"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01","The student, Sandhya Ashok, accepted the attached license on 2025-05-06 at 11:13.","The student, Sandhya Ashok, submitted this Thesis for approval on 2025-05-06 at 11:15.","This Thesis was approved for publication on 2025-05-06 at 19:27.","DSpace SAF Submission Ingestion Package generated from Vireo submission #22227 on 2025-10-19 at 19:17:05","This thesis explores the characterization of infrared (IR) imaging systems by microfabricating and analyzing USAF targets with varying thicknesses (0.6 μm to 5.3 μm) using SU-8 photoresist. The targets were fabricated in a cleanroom environment to ensure controlled conditions and high precision. Designed with well-defined USAF patterns, they served as reliable test samples to assess spectral accuracy and resolution capability due to their tailored and precisely measured parameters. Comparative thickness measurements using surface profilometry (DekTak3ST) and laser confocal microscopy (Keyence VK-X1000) revealed that surface profilometry was more accurate for thin films (< 1 μm) due to challenges in resolving transparent film surfaces via confocal microscopy. High-resolution profiles of USAF targets demonstrated a superior edge quality in laser confocal profiling with 0.08 μm pitch size but were prone to negative artifacts due to the same resolution issue. The Varian 620-IR FTIR imaging system was used to acquire spectra, and 1608 cm⁻¹ peak (aromatic C=C) was analyzed, to evaluate spectral fidelity. While the results followed Beer-Lambert law by showing increasing absorbances for thicker films, thicker films presented baseline linearity challenges. This dataset of well characterized targets provides a strong foundation for validating future IR instrument accuracies as well as IR simulation models."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Characterization of infrared imaging systems"]}]}],"canonical_facts":{"dc:contributor":["Bhargava, Rohit"],"dc:creator":["Ashok, Sandhya"],"dc:date":["2025-05-06","2025-05"],"dc:description":["Submission published under a 24 month embargo labeled 'U of I Access', the embargo will last until 2027-05-01","The student, Sandhya Ashok, accepted the attached license on 2025-05-06 at 11:13.","The student, Sandhya Ashok, submitted this Thesis for approval on 2025-05-06 at 11:15.","This Thesis was approved for publication on 2025-05-06 at 19:27.","DSpace SAF Submission Ingestion Package generated from Vireo submission #22227 on 2025-10-19 at 19:17:05","This thesis explores the characterization of infrared (IR) imaging systems by microfabricating and analyzing USAF targets with varying thicknesses (0.6 μm to 5.3 μm) using SU-8 photoresist. The targets were fabricated in a cleanroom environment to ensure controlled conditions and high precision. Designed with well-defined USAF patterns, they served as reliable test samples to assess spectral accuracy and resolution capability due to their tailored and precisely measured parameters. Comparative thickness measurements using surface profilometry (DekTak3ST) and laser confocal microscopy (Keyence VK-X1000) revealed that surface profilometry was more accurate for thin films (< 1 μm) due to challenges in resolving transparent film surfaces via confocal microscopy. High-resolution profiles of USAF targets demonstrated a superior edge quality in laser confocal profiling with 0.08 μm pitch size but were prone to negative artifacts due to the same resolution issue. The Varian 620-IR FTIR imaging system was used to acquire spectra, and 1608 cm⁻¹ peak (aromatic C=C) was analyzed, to evaluate spectral fidelity. While the results followed Beer-Lambert law by showing increasing absorbances for thicker films, thicker films presented baseline linearity challenges. This dataset of well characterized targets provides a strong foundation for validating future IR instrument accuracies as well as IR simulation models."],"dc:format":["application/pdf"],"dc:identifier":["https://hdl.handle.net/2142/129634"],"dc:language":["en","eng"],"dc:rights":["Copyright 2025 Sandhya Ashok"],"dc:subject":["Infrared Imaging Systems","Imaging Systems","Characterization","Fabrication","Microfabrication","Fourier Transform Infrared Imaging","FTIR"],"dc:title":["Characterization of infrared imaging systems"],"dc:type":["text","Thesis"],"thesis:degree_discipline":["Electrical & Computer Engr"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S."],"thesis:institution_name":["University of Illinois Urbana-Champaign"]},"updated_at":"2026-07-22T22:25:05Z"}