Elastic scattering and transport of tin ions in hydrogen gas

In order to continue increasing the power output of extreme ultraviolet lithography sources, the high energy tin ions, a byproduct of the source, must be mitigated. Otherwise, the ions will destroy critical components of the source rendering it useless. Therefore, understanding the basic physics governing their transport is needed to develop strategies for stopping the ions. This is the motivation for this thesis. This thesis reviews physics for understanding charged particle transport in relevant energy regimes for an EUV source. The interatomic potential between ! and molecular hydrogen is found using quantum chemistry software. This potential is used to calculate elastic and inelastic cross sections. Off the shelf and custom transport codes are used to calculate the stopping ability of hydrogen and predict its penetration distance into a hydrogen gas target. Energy loss due to collision induced dissociation was not a major sink of energy for the ions. Additionally, coulomb collisions with a background plasma are not a major energy loss mechanism.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Nuclear, Plasma, Radiolgc Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2024

Author dc:creator

• Bartlett, Nathan

Contributors dc:contributor

• Ruzic, David N
• Andruczyk, Daniel

• Ions
• Euv
• Scattering
• Cross Section

Statement dc:rights

• Copyright 2024 Nathan Bartlett

Language dc:language

en, eng

Handle dc:identifier

https://hdl.handle.net/2142/125822

OAI record oai:identifier

https://www.ideals.illinois.edu/oai-pmh?verb=GetRecord&metadataPrefix=etdms&identifier=oai%3Awww.ideals.illinois.edu%3A2142%2F125822