{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/125822"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/125822","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Elastic scattering and transport of tin ions in hydrogen gas","abstract":"Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2026-08-01","abstract_html":"Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2026-08-01","abstract_has_math":false,"creators":["Bartlett, Nathan"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Nuclear, Plasma, Radiolgc Engr","degree_department":null,"school":null,"contributors":["Ruzic, David N","Andruczyk, Daniel"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2024,"date_issued":"2024-08","date_published":"2024-08","updated_at":"2026-07-22T22:25:02Z","subjects":["Ions","Euv","Scattering","Cross Section"],"languages":["en","eng"],"rights":["Copyright 2024 Nathan Bartlett"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://hdl.handle.net/2142/125822","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Ruzic, David N","Andruczyk, Daniel"]},{"key":"dc:creator","label":"Author","values":["Bartlett, Nathan"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2024-08","2024-07-17"]},{"key":"dc:type","label":"Dc Type","values":["text","Thesis"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Nuclear, Plasma, Radiolgc Engr"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Ions","Euv","Scattering","Cross Section"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en","eng"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2024 Nathan Bartlett"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://hdl.handle.net/2142/125822"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2026-08-01","The student, Nathan Bartlett, accepted the attached license on 2024-07-11 at 08:50.","The student, Nathan Bartlett, submitted this Thesis for approval on 2024-07-11 at 08:56.","This Thesis was approved for publication on 2024-07-17 at 11:35.","DSpace SAF Submission Ingestion Package generated from Vireo submission #21063 on 2025-02-04 at 21:25:51","In order to continue increasing the power output of extreme ultraviolet lithography sources, the high energy tin ions, a byproduct of the source, must be mitigated. Otherwise, the ions will destroy critical components of the source rendering it useless. Therefore, understanding the basic physics governing their transport is needed to develop strategies for stopping the ions. This is the motivation for this thesis. This thesis reviews physics for understanding charged particle transport in relevant energy regimes for an EUV source. The interatomic potential between ! and molecular hydrogen is found using quantum chemistry software. This potential is used to calculate elastic and inelastic cross sections. Off the shelf and custom transport codes are used to calculate the stopping ability of hydrogen and predict its penetration distance into a hydrogen gas target. Energy loss due to collision induced dissociation was not a major sink of energy for the ions. Additionally, coulomb collisions with a background plasma are not a major energy loss mechanism."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Elastic scattering and transport of tin ions in hydrogen gas"]}]}],"canonical_facts":{"dc:contributor":["Ruzic, David N","Andruczyk, Daniel"],"dc:creator":["Bartlett, Nathan"],"dc:date":["2024-08","2024-07-17"],"dc:description":["Submission published under a 24 month embargo labeled 'Closed Access', the embargo will last until 2026-08-01","The student, Nathan Bartlett, accepted the attached license on 2024-07-11 at 08:50.","The student, Nathan Bartlett, submitted this Thesis for approval on 2024-07-11 at 08:56.","This Thesis was approved for publication on 2024-07-17 at 11:35.","DSpace SAF Submission Ingestion Package generated from Vireo submission #21063 on 2025-02-04 at 21:25:51","In order to continue increasing the power output of extreme ultraviolet lithography sources, the high energy tin ions, a byproduct of the source, must be mitigated. Otherwise, the ions will destroy critical components of the source rendering it useless. Therefore, understanding the basic physics governing their transport is needed to develop strategies for stopping the ions. This is the motivation for this thesis. This thesis reviews physics for understanding charged particle transport in relevant energy regimes for an EUV source. The interatomic potential between ! and molecular hydrogen is found using quantum chemistry software. This potential is used to calculate elastic and inelastic cross sections. Off the shelf and custom transport codes are used to calculate the stopping ability of hydrogen and predict its penetration distance into a hydrogen gas target. Energy loss due to collision induced dissociation was not a major sink of energy for the ions. Additionally, coulomb collisions with a background plasma are not a major energy loss mechanism."],"dc:format":["application/pdf"],"dc:identifier":["https://hdl.handle.net/2142/125822"],"dc:language":["en","eng"],"dc:rights":["Copyright 2024 Nathan Bartlett"],"dc:subject":["Ions","Euv","Scattering","Cross Section"],"dc:title":["Elastic scattering and transport of tin ions in hydrogen gas"],"dc:type":["text","Thesis"],"thesis:degree_discipline":["Nuclear, Plasma, Radiolgc Engr"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:25:02Z"}