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Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 249 for “"nanometer scale"”.
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Nanometer-scale placement in electron-beam lithography
Electron-beam lithography is capable of high-resolution lithographic pattern generation (down to 10 nm or below). However, for conventional e-beam lithography, pattern-placement accuracy is inferior to resolution. Despite significant efforts to improve pattern placement, a limit is being …
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Local Viscosity and Environment on the Nanometer Scale
New optical setup for two photon excitation time-resolved fluorescence anisotropy and lifetime measurements was built and used to understand the local environment and viscosity. The rotational correlation time constants by the fluorescence anisotropy provide the information on the hydrodynamic …
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Probabilistic design for emerging memory and nanometer-scale logic
As semiconductor technology has scaled down, the impact of stochastic behavior in very large scale integrated circuits (VLSI) has become an ever-more important concern. This dissertation investigates two distinct classes of problems that require the use of probabilistic methods and models: (1) …
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Low Temperature Selective Silicon Epitaxy at the Nanometer Scale
A technique for providing low-temperature, nanometer scale, selective silicon epitaxy using the hydrogen-passivated silicon surface as a lithographic mask has been developed. The STM tip is used to define chemically reactive templates on the monohydride Si(100) surface at temperatures below the …
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Electron beam interactive oxide films for nanometer scale lithography
A number of oxide thin films produced by rf sputtering have been found to show high resolution lithographic characteristics when exposed under high dose rate conditions in a scanning transmission electron microscope. Holes and lines less than 10 nm in dimensions have been formed in amorphous films …
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Quantitative nanometer-scale thermal metrology using scanning joule expansion microscopy
Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by William Ingram (wingram2@illinois.edu) on 2011-05-25T14:41:49Z Item is restricted until 2013-05-25T14:41:28Z
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Nanometer scale observation of magnetization textures induced by ultrashort laser pulses
… magnetic materials on a femtosecond timescale, but even reverse the magnetization in certain (anti-)ferromagnetically coupled alloys and multilayer systems. Very recently, it was demonstrated that laser pulses create topological magnetic solitons called magnetic skyrmions in ferromagnetic …
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Methodology for Standby Leakage Power Reduction in Nanometer-Scale CMOS Circuits
<p>In nanometer-scale CMOS technology, leakage power has become a major component of the total power dissipation due to the downscaling of threshold voltage and gate oxide thickness. The leakage power consumption has received even more attention by increasing demand for mobile devices. Since mobile …
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Nanometer-scale temperature measurements of phase change memory and carbon nanomaterials
This work investigates nanometer-scale thermometry and thermal transport in new electronic devices to mitigate future electronic energy consumption. Nanometer-scale thermal transport is integral to electronic energy consumption and limits current electronic performance. New electronic devices are …
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Coating and filling of nanometer-scale structures using chemical vapor deposition
… such as trenches or vias, is necessary in nanoscale device fabrication. Examples include shallow trench isolation, metallization, and reverse tone patterning in integrated circuits and optical waveguides in photonic devices. Gas-phase coating methods such as chemical vapor deposition (CVD) and …
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Generation and relaxation of nanometer-scale roughness on the germanium(001) surface
… exposure times. A well defined in-plane length scale is observed on the crystalline surfaces etched at $165270\sp\circ$C exhibit a regular pattern of pits. The isotropy of this pattern formation of pits argues against surface curvature dependent sputtering rate and suggests that asymmetric …
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Scanning tunneling microscopy and spectroscopy of nanometer scale metallic features on silicon surfaces
Nanometer scale metals are of great interest due to their potential applications in the future of molecular/atomic scale devices. For example, nanometer scale metal contacts on semiconducting single-walled carbon nanotubes (SWNTs) can determine the transport performance of SWNT based field effect …
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A Study on Unintentional and Intentional Sources of Variability in Nanometer Scale Digital Circuits
As technology has scaled aggressively over the past 50 years, device reliability issues and escalated power dissipation have become growing concerns in digital very large scale integrated (VLSI) circuits. Today's integrated circuits, which implement digital systems with billions of transistors in …
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Thermal Transport on the Nanometer Scale and the Effect of Microstructure and Interface Resistance
… of phonons involved in thermal transport on nanometer scale and to address the need for systematic information about the thermal properties of ultra-thin films. The present work includes data on thermal transport in dense and porous hydrogen silsesquioxane thin films and thin SiO2 films, …
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Electromigration-Induced Interconnect Aging and its Repercussions on the Performance of Nanometer-Scale VLSI Circuits
Modern electronic machines are powered by the integrated-circuit (IC), a semiconductor device consisting of compact electronic circuits on a silicon substrate. ICs can contain over a billion fundamental computing elements (transistors) that are connected by a network of metal wires called …
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Probing the formation of mammalian cell lipid microdomains with nanometer-scale imaging secondary ion mass spectrometry
… domains exist in the plasma membrane on a length scale of ~200 nm, and they form non-random clustering on the cell surface. Disruption of the cellular cytoskeleton resulted in a loss of detectable statistically significant domains. In addition, the rapid transport of sphingolipids to the plasma …
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Plasma Assisted Cleaning by Electrostatics of Insulating Nanometer Scale Contamination from Materials Used in Integrated Circuit Manufacturing
Made available in DSpace on 2017-07-06T18:55:12Z (GMT). No. of bitstreams: 3 Lytle_Wayne_M_MS.pdf: 27922220 bytes, checksum: 67faae2239adf87cba4f0a7f443a8456 (MD5) Lytle_Wayne_M_MS_ABS.pdf: 35267 bytes, checksum: 25efd85c0e399395e1a5a857fbd3a791 (MD5) license.txt: 4813 bytes, checksum: …
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Probing local thermal, mechanical, and optical properties utilizing dynamic cantilever response in contact mode atomic force microscopy
… the behavior of materials and devices at the nanometer-scale is important because modern materials and devices have nanometer-scale features. Atomic force microscopy (AFM) is a powerful tool for studying nanometer-scale behavior due to excellent spatial resolution (tip radius < 25 nm) and the …
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Nanoscale magnetic resonance imaging using silicon nanowire oscillators
This dissertation describes new techniques for nanometer-scale magnetic resonance imaging. We report methods that enable the use of (1) silicon nanowires as ultrasensitive force transducers for magnetic resonance detection and (2) pulsed magnetic resonance techniques for nanometer-scale imaging and …
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