Back to results

University of New Mexico

MEMS enabled Fabry-Perot cavity for cQED experiments

Abstract

dc:description.abstract

The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\\%) micro-mirrors.

Degree

thesis:*
Name thesis:degree_name
Electrical Engineering
Level thesis:degree_level
Thesis
Discipline thesis:degree_discipline
Electrical and Computer Engineering
Year
2011

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Benito, Francisco Martin
Contributors dc:contributor
  • Leseman, Zayd Chad
  • Biedermann, Grant W.
  • Christodoulou, Christos

Subjects

dc:subject × 5

Rights

Language dc:language
English

Identifiers

dc:identifier.*
Repository record dc:identifier
https://digitalrepository.unm.edu/ece_etds/30
OAI identifier oai:identifier
oai:digitalrepository.unm.edu:ece_etds-1029

Chain of custody

source
Harvested from
University of New Mexico
Base URL
digitalrepository.unm.edu/do/oai/
Last updated
2026-07-24
Source record
OAI-PMH GetRecord
citation

Benito, Francisco Martin. MEMS enabled Fabry-Perot cavity for cQED experiments. Thesis thesis, 2011. https://digitalrepository.unm.edu/ece_etds/30