{"id":{"repo_id":"unm","oai_identifier":"oai:digitalrepository.unm.edu:ece_etds-1029"},"canonical_url":"https://search.dev.ndltd.org/etd/unm/oai:digitalrepository.unm.edu:ece_etds-1029","repository":{"repo_id":"unm","name":"University of New Mexico","base_url":"https://digitalrepository.unm.edu/do/oai/"},"display":{"title":"MEMS enabled Fabry-Perot cavity for cQED experiments","abstract":"The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\\\\%) micro-mirrors.","abstract_html":"The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\\\\%) micro-mirrors.","abstract_has_math":false,"creators":["Benito, Francisco Martin"],"institution":null,"degree_name":"Electrical Engineering","degree_level":"Thesis","degree_discipline":"Electrical and Computer Engineering","degree_department":null,"school":null,"contributors":["Leseman, Zayd Chad","Biedermann, Grant W.","Christodoulou, Christos"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2011,"date_issued":"2011-07-01T07:00:00Z","date_published":"2011-07-01T07:00:00Z","updated_at":"2026-07-24T05:27:10Z","subjects":["Optical MEMS","Fabry-Perot interferometers","Microactuators","Quantum electrodynamics","Integrated optics."],"languages":["English"],"rights":[],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"https://digitalrepository.unm.edu/ece_etds/30","outbound_label":"Repository record","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Leseman, Zayd Chad","Biedermann, Grant W.","Christodoulou, Christos"]},{"key":"dc:creator","label":"Author","values":["Benito, Francisco Martin"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical and Computer Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis","Masters"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Electrical Engineering"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Optical MEMS","Fabry-Perot interferometers","Microactuators","Quantum electrodynamics","Integrated optics."]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["English"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["https://digitalrepository.unm.edu/ece_etds/30"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description.abstract","label":"Abstract","values":["The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\\\\%) micro-mirrors."]},{"key":"dc:title","label":"Title","values":["MEMS enabled Fabry-Perot cavity for cQED experiments"]}]}],"canonical_facts":{"dc:contributor":["Leseman, Zayd Chad","Biedermann, Grant W.","Christodoulou, Christos"],"dc:creator":["Benito, Francisco Martin"],"dc:description.abstract":["The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability for each micro component, which requires a significant integration effort. One example of a new experimental technique in atomic physics is the realization of optical cavities which is a very attractive model for quantum information and communication, because it permits the study of light-matter effect. The important exigency of an integrated micro cavity consisting of a micro mirror and a fiber optics cable are; alignment between them to form a small cavity volume and actuation to allow for adjusment of the cavity length. In this Master thesis the fabrication of 1-D v-shape or chevron thermal actuator is proposed based on the following characteristics: the actuator exploits the thermal expansion property of silicon to generate mechanical actuation, offers linear in-plane displacement, large force in small area compared to other actuators schemes and a shuttle that is capable of carrying an optical fiber that creates an optical cavity between it and a micro-mirror. Additionally, fabrication and characterization techniques are also described for the highly reflective (99.9988\\\\%) micro-mirrors."],"dc:identifier":["https://digitalrepository.unm.edu/ece_etds/30"],"dc:language":["English"],"dc:subject":["Optical MEMS","Fabry-Perot interferometers","Microactuators","Quantum electrodynamics","Integrated optics."],"dc:title":["MEMS enabled Fabry-Perot cavity for cQED experiments"],"thesis:degree_discipline":["Electrical and Computer Engineering"],"thesis:degree_level":["Thesis","Masters"],"thesis:degree_name":["Electrical Engineering"]},"updated_at":"2026-07-24T05:27:10Z"}