Global ETD Search
Search theses and dissertations gathered from participating repositories worldwide. Every result links back to the library that holds it. No account is needed.
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Showing 1 to 20 of 22 for “"Microactuators"”.
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Thermal Microactuators for Microelectromechanical Systems (MEMS)
<p>Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in …
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Microactuators and their application in micro-opto-electro-mechanical systems (MOEMS)
Microactuators are active elements for microelectromechanical systems (MEMS), and are used to provide force to move the MEMS device in the way required. Therefore, their force characteristics, displacement capabilities and velocity ranges are of importance, and require to be investigated. Scratch …
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Analysis of hybrid electrothermomechanical microactuators with integrated electrothermal and electrostatic actuation
… that such integrated electrothermomechanical microactuators have more advantages than pure electrothermal or electrostatic devices. We further propose a framework to model hybrid electrothermomechanical actuation to get a consistent solution for the coupled mechanical, thermal and electrical …
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Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators
As technology advances and engineering capabilities improve, more research has focused on microscopic possibilities. Microelectromechanical systems (MEMS) is one area that has received much attention recently. Within MEMS much research has focused on sensing and actuation. This thesis presents work …
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A new mechanical characterization method for thin film microactuators and its application to NiTiCu shape memory alloy
… presented for the mechanical characterization of microactuators and applied to shape memory alloy (SMA) thin films. , A test instrument was designed to utilize a spring-loaded transducer in measuring displacements with resolution of 1.5 [mu]m and forces with resolution of 0.2 mN. Employing an …
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Reduced-Order Modeling and Design Optimization of Thermomechanical Shape Memory Alloy-Based Bistable Microactuators and Hyperelastic Material Systems
… for designing advanced materials and bistable microactuators. The work begins with a stabilized finite element formulation that addresses common numerical issues such as volumetric locking, shear locking, and hourglassing. This is achieved using incompatible displacement modes within a …
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EXTREME VERTICAL DISPLACEMENT, HIGH FORCE, SILICON MICROSTAGE ZIPPER ACTUATORS
Large vertical deflection, high force microactuators are desired in MEMS for a variety of applications. This thesis details a novel large-displacement electrostatic "zipper" microactuator capable of achieving hundreds of microns of out-of-plane deflection and delivering high forces, fabricated …
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Fully Compliant Tensural Bistable Mechanisms (FTBM) with On-Chip Thermal Actuation
… with the result-ing Thermomechanical In-plane Microactuators (TIMs) and Amplified Thermomechanical In-plane Microactuators (ATIMs). Successful on-chip actuation was demonstrated. The bistable mechanisms and actuators in this work were fabricated in the MUMPs and SUMMiT V surface micromachining …
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Simulation-Based Design Under Uncertainty for Compliant Microelectromechanical Systems
… using bistable micromechanisms and thermal microactuators as examples.
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Modeling and Control of Surface Micromachined Thermal Actuators
… transient and steady-state response of thermal microactuators is desirable to provide guidance for design and operation. However, modeling the full response of thermal actuators is challenging due to the temperature-dependent material properties and nonlinear deformations that must be included …
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Efficient Mixed -Domain Analysis of Electrostatic Microelectromechanical Systems (Mems)
… microswitches, micro mirror devices, comb drive microactuators and a micocompressor.
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Experimental electrochemical investigation of Si/A1 in tetra-methyl ammonium hydroxide (TMAH)
… of silicon for the fabrication of micro-sensors, microactuators, and microsystems. At present it is problematic to anisotropically etch silicon, in wet etchants such as TMAK while protecting deposited aluminum layers. This is especially a problem in CMOS-compatible micromachining, where the etch …
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Design of a high-speed, meso-scale nanopositioners driven by electromagnetic actuators
… silicon flexure bearing and unique moving-coil microactuators that employ millimeter-scale permanent magnets and stacked, planar-spiral micro-coils. The new moving-coil actuator outperforms previous coil designs as it enables orthogonal and linear force capability in two axes while minimizing …
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Modeling and Simulation of MEMS Devices
… modeling and simulation tools for impact microactuators. Nonsmooth dynamics due to impacts and friction are studied, combining various approaches, including direct numerical integration, root-finding technique for periodic motions, continuation of grazing periodic orbits, and local …
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Dual-stage Thermally Actuated Surface-Micromachined Nanopositioners
… has one translational degree of freedom. Thermal microactuators operate both stages. The first stage includes a bistable mechanism: it travels 52 micrometers between two discrete positions. The second stage is mounted on the first stage and moves continuously through an additional 8 micrometers in …
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Model order reduction of electro-thermal MEMS
… device. Other devices, such as microsensors and microactuators need high temperatures to improve transduction efficiency. In both cases the designer should be able to predict the temperature distribution for the given electrical input and the impact of the temperature on the devices electronics …
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Microscale actuators from carbon nanotube and hydrogel composites
… fabrication approach. These CNT/PNIPAM hydrogel microactuators have sizes ranging from 10 µm to 1 mm respond to light, can be cycled over 1500 times with no sign of degradation, and have response times as fast as 15 ms. The driving force for the actuators is the volume phase transition of PNIPAM. …
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Design fabrication and calibration of MEMS actuators for in-situ materials testing
Many MEMS devices utilize thin metallic films as mechanical structures. The elastic and plastic properties of these thin films (thickness < 1μm) are significantly different from those of the bulk material. At these scales the volume fraction of material defects such as: grain boundaries, …
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Linear and Cross-linked UCST-Type Polymers : Synthesis and Properties
… volume-change that was utilized for design of microactuators. In Outlook, the challenges and opportunities for UCST-type polymers were discussed. So far nonionic UCST-type polymers are focusing on polymers containing amide or ureido groups. Other hydrophilic polymers with suitable content of …
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MEMS enabled Fabry-Perot cavity for cQED experiments
The development of novel experimental techniques in atomic physics is allowing for the manipulation and control of atoms in structured silicon chips. These new techniques to manipulate atoms in a chip require building micro systems on chip that support actuation, alignment control and tunability …
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