Determination of Ionization Fraction and Plasma Potential in a DC Magnetron Sputtering System Using a Quartz Crystal Microbalance and a Gridded Energy Analyzer

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Name thesis:degree_name

M.S. (master's)

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Nuclear, Plasma, and Radiological Engineering

Year dc:date

2017

Author dc:creator

• Green, Karyn M.

• nuclear engineering
• ionization fraction
• plasma potntial
• DC magnetron
• quartz crystal
• gridded energy analyzer
• diagnostic
• ion-to-neutral ratio
• linear motion feedtthrough
• wafer chuck

Statement dc:rights

• Copyright 1997 Karyn Melissa Green

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/96346

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/96346