Determination of Ionization Fraction and Plasma Potential in a DC Magnetron Sputtering System Using a Quartz Crystal Microbalance and a Gridded Energy Analyzer

Embargo set by: Seth Robbins for item 99491 Lift date: Forever Reason: Restricted to UIUC community

Name thesis:degree_name

M.S. (master's)

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Nuclear, Plasma, and Radiological Engineering

Year dc:date

2017

Author dc:creator

• Green, Karyn M.

• nuclear engineering
• ionization fraction
• plasma potntial
• DC magnetron
• quartz crystal
• gridded energy analyzer
• diagnostic
• ion-to-neutral ratio
• linear motion feedtthrough
• wafer chuck

Statement dc:rights

• Copyright 1997 Karyn Melissa Green

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/96346

OAI record oai:identifier

https://www.ideals.illinois.edu/oai-pmh?verb=GetRecord&metadataPrefix=etdms&identifier=oai%3Awww.ideals.illinois.edu%3A2142%2F96346