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Showing 1 to 12 of 12 for “"Ionization Fraction"”.
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Determination of Ionization Fraction and Plasma Potential in a DC Magnetron Sputtering System Using a Quartz Crystal Microbalance and a Gridded Energy Analyzer
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Secondary Plasma Sources for Ionized Physical Vapor Deposition
… the other two sources exhibit are eliminated. Ionization fractions to the substrate of 51 +/- 10% with a deposition rate of 847 +/- 42 A/min. are found. Without the antenna, the ionization fraction is 30 +/- 6% and the deposition rate is 815 +/- 41 A/min. This remote source is envisioned to sit …
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Analysis of energy balance in a helicon coupled to an inertial electrostatic confinement device
… used the measured ion current to determine the ionization fraction. Using the ionization fraction as an input into the zero dimensional model an electron temperature was obtained. With the electron temperature, collision and sheath/presheath properties can be determined. Finally entering the …
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Modeling and Measurements of an Ionized Physical Vapor Depositon Device Plasma
… product of the simulation is a prediction of the ionization fraction of the sputtered atom flux at the substrate under various conditions. This quantity was experimentally measured and the results compared to the simulation.
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Fragmentation of magnetically-supported, weakly-ionized molecular clouds
… results of a parameter study which varies the ionization fraction, mass-to-flux ratio, and velocity perturbation in the model clouds.
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Solving the system of atomic rate equations during recombination
… the effect of individual processes on the total ionization fraction.
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Numerical modelling of a radio-frequency micro ion thruster
… driving frequency increases power absorption and ionization fraction tremendously. It has a positive but limited effect on propulsive performance as the ion beam current is space-charge limited.
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Copper metallization with an electron cyclotron resonance
… and temperature, surface bias, and copper ionization fraction at the deposition surface, influenced fill quality of the features. The results indicated that the fill quality was insensitive to all parameters except for the surface biasing conditions; however, with the use of an argon …
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Plasma diagnostics and ITO film deposition by RF-assisted closed-field dual magnetron system
… secondary plasma. The concept is to increase the ionization faction with the RF enhancement and utilize the ion energy instead of thermal energy to facilitate the ITO film growth. The closed-field unbalanced magnetrons create a plasma in the intervening region rather than confine it near the …
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Experimental investigation of the trigger problem in magnetic reconnection
… and the interstellar medium, where the ionization fraction is low. In these experiments, a plasma filament propagates across a magnetic field in a background of neutral atoms. The filament motion is driven by charge separation in an inhomogeneous magnetic field, and this drive is …
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Advanced propulsion for microsatellites
… the resultant leakage of electrons, the observed ionization fraction and, therefore, the utilization efficiency were lower than expected. Despite the low efficiencies, which were most likely caused by the design imperfections rather than physical limitations, the effort to miniaturize a Hall …
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Comparison of high power impulse magnetron sputtering and modulated pulsed power sputtering for interconnect metallization
… process of electroplating. An enhanced metal ionization is believed to be critical. Ions in the deposition flux can increase the nucleation density and adhesion of Cu to Ta due to their surface penetration, and create less overhang due to the high directionality of ion flux. In this work, high …