Characterization of Magnetron-Sputtered Partially Ionized Deposition as a Function of Metal and Gas Species

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Name thesis:degree_name

M.S. (master's)

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Nuclear, Plasma, and Radiological Engineering

Year dc:date

2017

Author dc:creator

• Allain, Monica M. C.

• nuclear engineering
• gas species
• ionized deposition
• metal species
• magnetron-sputtered
• ionized metal fluxes
• cathode
• gridded energy analyzer
• quartz crystal microbalance

Statement dc:rights

• Copyright 2000 Monica Marie Cortez Allain

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/96303

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/96303