{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/96303"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/96303","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Characterization of Magnetron-Sputtered Partially Ionized Deposition as a Function of Metal and Gas Species","abstract":"Made available in DSpace on 2017-07-06T18:42:14Z (GMT). No. of bitstreams: 3 Allain_Monica_M_C_MS.pdf: 58019977 bytes, checksum: 4321fbe9df3b2ff27db7a25168c1475e (MD5) Allain_Monica_M_C_MS_ABS.pdf: 548280 bytes, checksum: e229bd5e9fd6338bb6b4380fdd932ba4 (MD5) license.txt: 4813 bytes, checksum: 715c4321821a960fa1a1e91d2ac7ebce (MD5) Previous issue date: 2000","abstract_html":"Made available in DSpace on 2017-07-06T18:42:14Z (GMT). No. of bitstreams: 3 Allain_Monica_M_C_MS.pdf: 58019977 bytes, checksum: 4321fbe9df3b2ff27db7a25168c1475e (MD5) Allain_Monica_M_C_MS_ABS.pdf: 548280 bytes, checksum: e229bd5e9fd6338bb6b4380fdd932ba4 (MD5) license.txt: 4813 bytes, checksum: 715c4321821a960fa1a1e91d2ac7ebce (MD5) Previous issue date: 2000","abstract_has_math":false,"creators":["Allain, Monica M. C."],"institution":null,"degree_name":"M.S. (master's)","degree_level":"Thesis","degree_discipline":"Nuclear, Plasma, and Radiological Engineering","degree_department":null,"school":null,"contributors":[],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2017,"date_issued":"2017-07-06T18:42:14Z","date_published":"2017-07-06T18:42:14Z","updated_at":"2026-07-22T22:26:37Z","subjects":["nuclear engineering","gas species","ionized deposition","metal species","magnetron-sputtered","ionized metal fluxes","cathode","gridded energy analyzer","quartz crystal microbalance"],"languages":["en"],"rights":["Copyright 2000 Monica Marie Cortez Allain"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/96303","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:creator","label":"Author","values":["Allain, Monica M. C."]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2017-07-06T18:42:14Z","10000-01-01","2000"]},{"key":"dc:type","label":"Dc Type","values":["Dissertation / Thesis","text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Nuclear, Plasma, and Radiological Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S. (master's)"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["nuclear engineering","gas species","ionized deposition","metal species","magnetron-sputtered","ionized metal fluxes","cathode","gridded energy analyzer","quartz crystal microbalance"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2000 Monica Marie Cortez Allain"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/96303"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Made available in DSpace on 2017-07-06T18:42:14Z (GMT). No. of bitstreams: 3 Allain_Monica_M_C_MS.pdf: 58019977 bytes, checksum: 4321fbe9df3b2ff27db7a25168c1475e (MD5) Allain_Monica_M_C_MS_ABS.pdf: 548280 bytes, checksum: e229bd5e9fd6338bb6b4380fdd932ba4 (MD5) license.txt: 4813 bytes, checksum: 715c4321821a960fa1a1e91d2ac7ebce (MD5) Previous issue date: 2000","Embargo set by: Seth Robbins for item 99448 Lift date: Forever Reason: Restricted to UIUC community","Restricted to UIUC community","U of I Only"]},{"key":"dc:title","label":"Title","values":["Characterization of Magnetron-Sputtered Partially Ionized Deposition as a Function of Metal and Gas Species"]}]}],"canonical_facts":{"dc:creator":["Allain, Monica M. C."],"dc:date":["2017-07-06T18:42:14Z","10000-01-01","2000"],"dc:description":["Made available in DSpace on 2017-07-06T18:42:14Z (GMT). No. of bitstreams: 3 Allain_Monica_M_C_MS.pdf: 58019977 bytes, checksum: 4321fbe9df3b2ff27db7a25168c1475e (MD5) Allain_Monica_M_C_MS_ABS.pdf: 548280 bytes, checksum: e229bd5e9fd6338bb6b4380fdd932ba4 (MD5) license.txt: 4813 bytes, checksum: 715c4321821a960fa1a1e91d2ac7ebce (MD5) Previous issue date: 2000","Embargo set by: Seth Robbins for item 99448 Lift date: Forever Reason: Restricted to UIUC community","Restricted to UIUC community","U of I Only"],"dc:identifier":["http://hdl.handle.net/2142/96303"],"dc:language":["en"],"dc:rights":["Copyright 2000 Monica Marie Cortez Allain"],"dc:subject":["nuclear engineering","gas species","ionized deposition","metal species","magnetron-sputtered","ionized metal fluxes","cathode","gridded energy analyzer","quartz crystal microbalance"],"dc:title":["Characterization of Magnetron-Sputtered Partially Ionized Deposition as a Function of Metal and Gas Species"],"dc:type":["Dissertation / Thesis","text"],"thesis:degree_discipline":["Nuclear, Plasma, and Radiological Engineering"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S. (master's)"]},"updated_at":"2026-07-22T22:26:37Z"}