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University of Illinois at Urbana-Champaign
Metal-assisted chemical etching of III-V semiconductor materials for optoelectronic applications
Abstract
dc:descriptionMade available in DSpace on 2016-03-02T19:33:17Z (GMT). No. of bitstreams: 2 ZHAO-THESIS-2015.pdf: 2077971 bytes, checksum: 160453c3994747e9326d0908a0f90983 (MD5) LICENSE.txt: 4207 bytes, checksum: badcc874098be4440f0e37e192b9525d (MD5) Previous issue date: 2015-10-07
Degree
thesis:*- Name thesis:degree_name
- M.S.
- Level thesis:degree_level
- Thesis
- Discipline thesis:degree_discipline
- Electrical & Computer Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2016
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Zhao, Xiang
- Contributors dc:contributor
-
- Li, Xiuling
Subjects
dc:subject × 5Rights
dc:rights- Statement dc:rights
-
- Copyright 2015 Xiang Zhao
- Language dc:language
- en
Identifiers
dc:identifier.*- Handle dc:identifier
- http://hdl.handle.net/2142/88956
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/88956