Development of antenna-coupled metal-insulator-metal diodes for infrared detection

The long-wavelength infrared (LWIR) band between 7 and 14 µm is significant for thermal imaging purposes because it coincides with the blackbody radiation peak of the human body and a low absorption window in the earth’s atmosphere. Also, at 10 µm wavelength, the earth’s terrestrial radiation is maximized and provides a good opportunity for untapped energy harvesting. These two factors combine to make a very strong need for a low-cost detector that operates at room temperature in this band. Antenna-coupled metal-insulator-metal (ACMIM) diodes are a leading candidate due to their high speed and potential manufacturability on Si substrates. In this work, Ni-NiO-Ni ACMIM diodes are fabricated using a two-step lithography process and an oxygen plasma oxidation. The device is characterized to both have current in the nA range and responsivities nearing 1000pA/W.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Winoto, Ardy

Contributors dc:contributor

• Feng, Milton

• infrared (IR) detector
• metal-insulator-metal (MIM) diode

Statement dc:rights

• Copyright 2015 Ardy Winoto

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/88202

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/88202