{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/88202"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/88202","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Development of antenna-coupled metal-insulator-metal diodes for infrared detection","abstract":"The long-wavelength infrared (LWIR) band between 7 and 14 µm is significant for thermal imaging purposes because it coincides with the blackbody radiation peak of the human body and a low absorption window in the earth’s atmosphere. Also, at 10 µm wavelength, the earth’s terrestrial radiation is maximized and provides a good opportunity for untapped energy harvesting. These two factors combine to make a very strong need for a low-cost detector that operates at room temperature in this band. Antenna-coupled metal-insulator-metal (ACMIM) diodes are a leading candidate due to their high speed and potential manufacturability on Si substrates. In this work, Ni-NiO-Ni ACMIM diodes are fabricated using a two-step lithography process and an oxygen plasma oxidation. The device is characterized to both have current in the nA range and responsivities nearing 1000pA/W.","abstract_html":"The long-wavelength infrared (LWIR) band between 7 and 14 µm is significant for thermal imaging purposes because it coincides with the blackbody radiation peak of the human body and a low absorption window in the earth’s atmosphere. Also, at 10 µm wavelength, the earth’s terrestrial radiation is maximized and provides a good opportunity for untapped energy harvesting. These two factors combine to make a very strong need for a low-cost detector that operates at room temperature in this band. Antenna-coupled metal-insulator-metal (ACMIM) diodes are a leading candidate due to their high speed and potential manufacturability on Si substrates. In this work, Ni-NiO-Ni ACMIM diodes are fabricated using a two-step lithography process and an oxygen plasma oxidation. The device is characterized to both have current in the nA range and responsivities nearing 1000pA/W.","abstract_has_math":false,"creators":["Winoto, Ardy"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Electrical & Computer Engineering","degree_department":null,"school":null,"contributors":["Feng, Milton"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-29T20:50:06Z","date_published":"2015-09-29T20:50:06Z","updated_at":"2026-07-22T22:26:31Z","subjects":["infrared (IR) detector","metal-insulator-metal (MIM) diode"],"languages":["en"],"rights":["Copyright 2015 Ardy Winoto"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/88202","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Feng, Milton"]},{"key":"dc:creator","label":"Author","values":["Winoto, Ardy"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-29T20:50:06Z","2017-09-30T09:15:27Z","2015-08","2015-07-17","2015-8"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical & Computer Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["infrared (IR) detector","metal-insulator-metal (MIM) diode"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["en"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2015 Ardy Winoto"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/88202"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["The long-wavelength infrared (LWIR) band between 7 and 14 µm is significant for thermal imaging purposes because it coincides with the blackbody radiation peak of the human body and a low absorption window in the earth’s atmosphere. Also, at 10 µm wavelength, the earth’s terrestrial radiation is maximized and provides a good opportunity for untapped energy harvesting. These two factors combine to make a very strong need for a low-cost detector that operates at room temperature in this band. Antenna-coupled metal-insulator-metal (ACMIM) diodes are a leading candidate due to their high speed and potential manufacturability on Si substrates. In this work, Ni-NiO-Ni ACMIM diodes are fabricated using a two-step lithography process and an oxygen plasma oxidation. The device is characterized to both have current in the nA range and responsivities nearing 1000pA/W.","Submission published under a 24 month embargo labeled 'U of I only', the embargo will last until 2017-08-01","The student, Ardy Winoto, accepted the attached license on 2015-07-16 at 10:31.","The student, Ardy Winoto, submitted this Thesis for approval on 2015-07-16 at 10:35.","This Thesis was approved for publication on 2015-07-17 at 11:08.","DSpace SAF Submission Ingestion Package generated from Vireo submission #8494 on 2015-09-29 at 15:00:02","Made available in DSpace on 2015-09-29T20:50:06Z (GMT). No. of bitstreams: 2 WINOTO-THESIS-2015.pdf: 15857961 bytes, checksum: 7379644f8b47c804b9a7279b53d6c594 (MD5) LICENSE.txt: 4208 bytes, checksum: aa6a552592a5abc06437b3ad3dfa0ed4 (MD5) Previous issue date: 2015-07-17","Embargo set by: Seth Robbins for item 89482 Lift date: 2017-09-29T20:50:34Z Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system","U of I Only Restriction Lifted for Item 89482 on 2017-09-30T09:15:27Z."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["Development of antenna-coupled metal-insulator-metal diodes for infrared detection"]}]}],"canonical_facts":{"dc:contributor":["Feng, Milton"],"dc:creator":["Winoto, Ardy"],"dc:date":["2015-09-29T20:50:06Z","2017-09-30T09:15:27Z","2015-08","2015-07-17","2015-8"],"dc:description":["The long-wavelength infrared (LWIR) band between 7 and 14 µm is significant for thermal imaging purposes because it coincides with the blackbody radiation peak of the human body and a low absorption window in the earth’s atmosphere. Also, at 10 µm wavelength, the earth’s terrestrial radiation is maximized and provides a good opportunity for untapped energy harvesting. These two factors combine to make a very strong need for a low-cost detector that operates at room temperature in this band. Antenna-coupled metal-insulator-metal (ACMIM) diodes are a leading candidate due to their high speed and potential manufacturability on Si substrates. In this work, Ni-NiO-Ni ACMIM diodes are fabricated using a two-step lithography process and an oxygen plasma oxidation. The device is characterized to both have current in the nA range and responsivities nearing 1000pA/W.","Submission published under a 24 month embargo labeled 'U of I only', the embargo will last until 2017-08-01","The student, Ardy Winoto, accepted the attached license on 2015-07-16 at 10:31.","The student, Ardy Winoto, submitted this Thesis for approval on 2015-07-16 at 10:35.","This Thesis was approved for publication on 2015-07-17 at 11:08.","DSpace SAF Submission Ingestion Package generated from Vireo submission #8494 on 2015-09-29 at 15:00:02","Made available in DSpace on 2015-09-29T20:50:06Z (GMT). No. of bitstreams: 2 WINOTO-THESIS-2015.pdf: 15857961 bytes, checksum: 7379644f8b47c804b9a7279b53d6c594 (MD5) LICENSE.txt: 4208 bytes, checksum: aa6a552592a5abc06437b3ad3dfa0ed4 (MD5) Previous issue date: 2015-07-17","Embargo set by: Seth Robbins for item 89482 Lift date: 2017-09-29T20:50:34Z Reason: Author requested U of Illinois access only (OA after 2yrs) in Vireo ETD system","U of I Only Restriction Lifted for Item 89482 on 2017-09-30T09:15:27Z."],"dc:format":["application/pdf"],"dc:identifier":["http://hdl.handle.net/2142/88202"],"dc:language":["en"],"dc:rights":["Copyright 2015 Ardy Winoto"],"dc:subject":["infrared (IR) detector","metal-insulator-metal (MIM) diode"],"dc:title":["Development of antenna-coupled metal-insulator-metal diodes for infrared detection"],"dc:type":["text"],"thesis:degree_discipline":["Electrical & Computer Engineering"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:26:31Z"}