Electrostatic Micro Gas Pumping for Micro Gas Chromatography Systems---Fabrication and Experiments

For the pump to perform as designed, the diaphragm has to fully zip and the inlet/outlet valves need to open and close as the diaphragm actuates. As an actuation compresses gas, the outlet valve should open with the inlet valve closed so that the gas flows out. As the diaphragm releases, the outlet valve closes and the inlet valve open, and the gas flows into the chamber. The volume of the pump chamber is 2∼6mul, and the full zipping actuation occurred at a voltage of 55∼270V depending on a diaphragm thickness. The valves have a conductance of larger than 1 sccm/kPa and a leakage of less than 0.002 sccm with opening pressures of 0.3∼3.48 kPa. The overall performance of a pump with two valves is investigated by pneumatic actuation as well as electrostatic actuation. The electrostatic actuation with two passive valves tends to suffer in-use stiction, and challenges and suggestions are made to overcome these problems. Successfully developed devices are tested with various actuation voltages and various duty cycles, and corresponding stroke volume and flow rates are measured.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Han, Jea-Hyeong

Contributors dc:contributor

• Shannon, Mark A.

• Engineering, Mechanical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3347391

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/83920