{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/83920"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/83920","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Electrostatic Micro Gas Pumping for Micro Gas Chromatography Systems---Fabrication and Experiments","abstract":"For the pump to perform as designed, the diaphragm has to fully zip and the inlet/outlet valves need to open and close as the diaphragm actuates. As an actuation compresses gas, the outlet valve should open with the inlet valve closed so that the gas flows out. As the diaphragm releases, the outlet valve closes and the inlet valve open, and the gas flows into the chamber. The volume of the pump chamber is 2∼6mul, and the full zipping actuation occurred at a voltage of 55∼270V depending on a diaphragm thickness. The valves have a conductance of larger than 1 sccm/kPa and a leakage of less than 0.002 sccm with opening pressures of 0.3∼3.48 kPa. The overall performance of a pump with two valves is investigated by pneumatic actuation as well as electrostatic actuation. The electrostatic actuation with two passive valves tends to suffer in-use stiction, and challenges and suggestions are made to overcome these problems. Successfully developed devices are tested with various actuation voltages and various duty cycles, and corresponding stroke volume and flow rates are measured.","abstract_html":"For the pump to perform as designed, the diaphragm has to fully zip and the inlet/outlet valves need to open and close as the diaphragm actuates. As an actuation compresses gas, the outlet valve should open with the inlet valve closed so that the gas flows out. As the diaphragm releases, the outlet valve closes and the inlet valve open, and the gas flows into the chamber. The volume of the pump chamber is 2∼6mul, and the full zipping actuation occurred at a voltage of 55∼270V depending on a diaphragm thickness. The valves have a conductance of larger than 1 sccm/kPa and a leakage of less than 0.002 sccm with opening pressures of 0.3∼3.48 kPa. The overall performance of a pump with two valves is investigated by pneumatic actuation as well as electrostatic actuation. The electrostatic actuation with two passive valves tends to suffer in-use stiction, and challenges and suggestions are made to overcome these problems. Successfully developed devices are tested with various actuation voltages and various duty cycles, and corresponding stroke volume and flow rates are measured.","abstract_has_math":false,"creators":["Han, Jea-Hyeong"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Shannon, Mark A."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-25T21:12:43Z","date_published":"2015-09-25T21:12:43Z","updated_at":"2026-07-22T22:26:22Z","subjects":["Engineering, Mechanical"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI3347391"],"render_values":[{"text":"(MiAaPQ)AAI3347391","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/83920","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Shannon, Mark A."]},{"key":"dc:creator","label":"Author","values":["Han, Jea-Hyeong"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-25T21:12:43Z","10000-01-01","2008"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Mechanical"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/83920","(MiAaPQ)AAI3347391"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["For the pump to perform as designed, the diaphragm has to fully zip and the inlet/outlet valves need to open and close as the diaphragm actuates. As an actuation compresses gas, the outlet valve should open with the inlet valve closed so that the gas flows out. As the diaphragm releases, the outlet valve closes and the inlet valve open, and the gas flows into the chamber. The volume of the pump chamber is 2∼6mul, and the full zipping actuation occurred at a voltage of 55∼270V depending on a diaphragm thickness. The valves have a conductance of larger than 1 sccm/kPa and a leakage of less than 0.002 sccm with opening pressures of 0.3∼3.48 kPa. The overall performance of a pump with two valves is investigated by pneumatic actuation as well as electrostatic actuation. The electrostatic actuation with two passive valves tends to suffer in-use stiction, and challenges and suggestions are made to overcome these problems. Successfully developed devices are tested with various actuation voltages and various duty cycles, and corresponding stroke volume and flow rates are measured.","Made available in DSpace on 2015-09-25T21:12:43Z (GMT). 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As an actuation compresses gas, the outlet valve should open with the inlet valve closed so that the gas flows out. As the diaphragm releases, the outlet valve closes and the inlet valve open, and the gas flows into the chamber. The volume of the pump chamber is 2∼6mul, and the full zipping actuation occurred at a voltage of 55∼270V depending on a diaphragm thickness. The valves have a conductance of larger than 1 sccm/kPa and a leakage of less than 0.002 sccm with opening pressures of 0.3∼3.48 kPa. The overall performance of a pump with two valves is investigated by pneumatic actuation as well as electrostatic actuation. The electrostatic actuation with two passive valves tends to suffer in-use stiction, and challenges and suggestions are made to overcome these problems. 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