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University of Illinois at Urbana-Champaign
Study of Buoyancy -Induced Flows in a Prototypical CVD Reactor
Abstract
dc:descriptionNext, an understanding the influence of the transient operating conditions in the prototypical CVD reactor was sought. Film growth rate shows time varying pattern due to the transient operating conditions. But it oscillates between two end steady states. Thus, it is observed that film growth rate and uniformity cannot be improved by applying pulse sequence of precursor gas, pulse sequence of inlet mass flow rate, and time-varying rotation speed of the wafer.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Mechanical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Luo, Gang
- Contributors dc:contributor
-
- S. Pratap Vanka
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3111576
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/83802