Additive Fabrication of Microstructures Using Self-Assembled Organic Thin-Film Templates

A simple multilayered device, a ferroelectric capacitor with platinum/PZT/platinum layers, was fabricated using the patterning methods developed in this thesis. This achievement demonstrates the possibility of developing a photolithography-free method for fabricating micron-scale metal-oxide-silicon devices based on printed organic thin films of self-assembled monolayers. With further development, the patterning of metal and ceramic thin films directed by SAMs appears to have a great potential in fabricating the three-dimensional thin film structures needed for advanced device technologies.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Materials Science and Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Jeon, Noo Li

Contributors dc:contributor

• Ralpha G. Nuzzo

• Engineering, Materials Science

Language dc:language

eng

Identifier

(MiAaPQ)AAI9737143

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/82876