Additive Fabrication of Microstructures Using Self-Assembled Organic Thin-Film Templates
A simple multilayered device, a ferroelectric capacitor with platinum/PZT/platinum layers, was fabricated using the patterning methods developed in this thesis. This achievement demonstrates the possibility of developing a photolithography-free method for fabricating micron-scale metal-oxide-silicon devices based on printed organic thin films of self-assembled monolayers. With further development, the patterning of metal and ceramic thin films directed by SAMs appears to have a great potential in fabricating the three-dimensional thin film structures needed for advanced device technologies.
University of Illinois - Urbana-Champaign
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University of Illinois at Urbana-Champaign