Additive Fabrication of Microstructures Using Self-Assembled Organic Thin-Film Templates
type: CreativeWork
description: A simple multilayered device, a ferroelectric capacitor with platinum/PZT/platinum layers, was fabricated using the patterning methods developed in this thesis. This achievement demonstrates the possibility of developing a photolithography-free method for fabricating micron-scale metal-oxide-silicon devices based on printed organic thin films of self-assembled monolayers. With further development, the patterning of metal and ceramic thin films directed by SAMs appears to have a great potential in fabricating the three-dimensional thin film structures needed for advanced device technologies.
abstract: A simple multilayered device, a ferroelectric capacitor with platinum/PZT/platinum layers, was fabricated using the patterning methods developed in this thesis. This achievement demonstrates the possibility of developing a photolithography-free method for fabricating micron-scale metal-oxide-silicon devices based on printed organic thin films of self-assembled monolayers. With further development, the patterning of metal and ceramic thin films directed by SAMs appears to have a great potential in fabricating the three-dimensional thin film structures needed for advanced device technologies.
author: Jeon, Noo Li
language: eng
keywords: Engineering, Materials Science
date published: 2015-09-25T20:53:27Z
date modified: 2026-07-22T22:26:20Z
provider: University of Illinois - Urbana-Champaign
publisher: Networked Digital Library of Theses and Dissertations
type: WebPage
source organization: University of Illinois at Urbana-Champaign

PropertyValue
property ID: Handle
value: http://hdl.handle.net/2142/82876