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University of Illinois at Urbana-Champaign
Low-Temperature Silicon Thin Films for Large-Area Electronics: Device Fabrication Using Soft Lithography and Laser-Crystallization by Sequential Lateral Solidification
Abstract
dc:descriptionMade available in DSpace on 2015-09-25T20:52:35Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3030441.pdf: 4345292 bytes, checksum: 73b405cc08fda9ba4c40258bb636c0cf (MD5) Previous issue date: 2001
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Materials Science and Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Jin, Hyun-Chul
- Contributors dc:contributor
-
- Abelson, John Robert
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI3030441
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/82710