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University of Illinois at Urbana-Champaign
Microdischarge Devices Fabricated in Silicon
Abstract
dc:descriptionThe second portion of this research examined the fabrication and characterization of a device fabrication using ultrasonic milling, the microdischarge. The current-voltage characteristics and spectra of the devices were recorded. Operation of microdischarge devices in the excimer species XeI, XeO, and I 2 was investigated. Arrays of microdischarge devices were fabricated and tested using a new geometry and biasing scheme.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Electrical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Frame, James Warren
- Contributors dc:contributor
-
- DeTemple, Thomas A.
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI9912230
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/81262