Microdischarge Devices Fabricated in Silicon
type: CreativeWork
description: The second portion of this research examined the fabrication and characterization of a device fabrication using ultrasonic milling, the microdischarge. The current-voltage characteristics and spectra of the devices were recorded. Operation of microdischarge devices in the excimer species XeI, XeO, and I 2 was investigated. Arrays of microdischarge devices were fabricated and tested using a new geometry and biasing scheme.
abstract: The second portion of this research examined the fabrication and characterization of a device fabrication using ultrasonic milling, the microdischarge. The current-voltage characteristics and spectra of the devices were recorded. Operation of microdischarge devices in the excimer species XeI, XeO, and I 2 was investigated. Arrays of microdischarge devices were fabricated and tested using a new geometry and biasing scheme.
author: Frame, James Warren
language: eng
keywords: Engineering, Electronics and Electrical
date published: 2015-09-25T20:10:18Z
date modified: 2026-07-22T22:26:15Z
provider: University of Illinois - Urbana-Champaign
publisher: Networked Digital Library of Theses and Dissertations
type: WebPage
source organization: University of Illinois at Urbana-Champaign

PropertyValue
property ID: Handle
value: http://hdl.handle.net/2142/81262