Microdischarge Devices Fabricated in Silicon
The second portion of this research examined the fabrication and characterization of a device fabrication using ultrasonic milling, the microdischarge. The current-voltage characteristics and spectra of the devices were recorded. Operation of microdischarge devices in the excimer species XeI, XeO, and I 2 was investigated. Arrays of microdischarge devices were fabricated and tested using a new geometry and biasing scheme.
University of Illinois - Urbana-Champaign
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University of Illinois at Urbana-Champaign