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University of Illinois at Urbana-Champaign
Transport and Agglomeration of Dust Contaminant Particles in Reactive Ion Etch Reactors
Abstract
dc:descriptionThe morphology of the agglomerates formed was also found to be dependent on plasma conditions. Agglomerates generally grow either in a diffusive or ballistic manner. Neutral gas flow in the reactor has been found to be a useful means of controlling contamination. Higher flow rates can sweep dust particles away from sensitive areas of the reactor before they reach the surfaces.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Electrical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2015
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Huang, Frederick Yi-Kai
- Contributors dc:contributor
-
- Kushner, M.J.
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (MiAaPQ)AAI9812632
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/81209