Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, and Interparticle Effects to Reduce Wafer Contamination

Particle transport is also affected by Coulomb interactions between particles. Experimental observations showed that in trapping sites particles form clouds and move collectively. We numerically investigated Coulomb interactions between particles. In rf discharges, ordered systems (Coulomb liquids or solids) occur at low particle temperatures. Dislocations in lattices result because of impurities of differently sized particles due to the disparity in particle charges. Waves may be induced by impacting a Coulomb solid with energetic particles. Repeated impacts can liquify the lattice if the particles do not dissipate enough energy as a result of fluid drag effects or Coulomb collisions.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Hwang, Helen H.

Contributors dc:contributor

• Kushner, M.J.

• Engineering, Materials Science

Language dc:language

eng

Identifier

(MiAaPQ)AAI9737140

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/81185