{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/81185"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/81185","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, and Interparticle Effects to Reduce Wafer Contamination","abstract":"Particle transport is also affected by Coulomb interactions between particles. Experimental observations showed that in trapping sites particles form clouds and move collectively. We numerically investigated Coulomb interactions between particles. In rf discharges, ordered systems (Coulomb liquids or solids) occur at low particle temperatures. Dislocations in lattices result because of impurities of differently sized particles due to the disparity in particle charges. 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Repeated impacts can liquify the lattice if the particles do not dissipate enough energy as a result of fluid drag effects or Coulomb collisions.","abstract_has_math":false,"creators":["Hwang, Helen H."],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Electrical Engineering","degree_department":null,"school":null,"contributors":["Kushner, M.J."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-25T20:09:58Z","date_published":"2015-09-25T20:09:58Z","updated_at":"2026-07-22T22:26:15Z","subjects":["Engineering, Materials Science"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI9737140"],"render_values":[{"text":"(MiAaPQ)AAI9737140","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/81185","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Kushner, M.J."]},{"key":"dc:creator","label":"Author","values":["Hwang, Helen H."]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-25T20:09:58Z","10000-01-01","1997"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Materials Science"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/81185","(MiAaPQ)AAI9737140"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Particle transport is also affected by Coulomb interactions between particles. 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Experimental observations showed that in trapping sites particles form clouds and move collectively. We numerically investigated Coulomb interactions between particles. In rf discharges, ordered systems (Coulomb liquids or solids) occur at low particle temperatures. Dislocations in lattices result because of impurities of differently sized particles due to the disparity in particle charges. Waves may be induced by impacting a Coulomb solid with energetic particles. Repeated impacts can liquify the lattice if the particles do not dissipate enough energy as a result of fluid drag effects or Coulomb collisions.","Made available in DSpace on 2015-09-25T20:09:58Z (GMT). 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