Microelectromechanical and Microfluidic Systems for Scanning Probe Lithography

This work addresses two major challenges faced by traditional single-probe SPL technology---lithography throughput and probe coating technique. System-level improvements of SPL have been successfully achieved. First, micromachined, thermally actuated cantilever probe arrays are developed to improve the throughput and flexibility of SPL. Multiple distinct patterns have been generated simultaneously with sub-50-nm line width in dip pen nanolithography (DPN) mode. Then, development of scanning probe contact printing (SPCP) technology and multifunctional probe arrays has expanded the capability of conventional single-functional SPL and demonstrated an excellent example of a highly integrated scanning probe device for pattern generation in DPN and SPCP modes and pattern inspection in AFM and LFM modes. In addition, the development of integrated microfluidic inking chips for chemical ink handling and SPL probe treatment further enhances the power of arrayed scanning probes. The inking chip can potentially coat an array of SPL tips with different inks simultaneously for multi-ink lithography.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Wang, Xuefeng

Contributors dc:contributor

• Chang Liu

• Engineering, Electronics and Electrical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3199167

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/80938