Ic-Rest(2): A Time-to-Market Driven IC Reliability Statistics Tool

The tool combines TCAD simulation, short-time tests and novel solutions to the SiO2 and Si-SiO2 defect generation rate equations (in time and space) under static and dynamic operation. The predicted failure statistics are best described by the generalized Gamma-distribution (or more accurately the generalized B-distribution) and on a Gumbel plot look more Weibull than Log-normal .

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Haggag, Amr

Contributors dc:contributor

• Hess, Karl

• Engineering, Electronics and Electrical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3070314

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/80790