Modeling and Simulation of Integrated Microstructures and Systems

To overcome the shortcomings of the above mentioned approaches, the goal of our research is to develop accurate computer-aided design tools and integrated design flow methodologies that provide orders-of-magnitude reduction in design and simulation cycle time; thus the cost of integrated microsystems. We have developed (i) automatic nonlinear model-order reduction methods to develop accurate behavioral models for MEMS devices; (ii) electrical modeling of MEMS devices; and (iii) an event-driven multilevel simulation environment to enable complete simulation of mixed-signal and mixed-technology integrated microsystems. These developments will allow microsystem simulation to be both fast and accurate. Design time will be decreased with quality improvement. System functionality and performance can be verified before committing to fabrication, thereby minimizing design iterations.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Electrical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Chen, Jinghong

Contributors dc:contributor

• Kang, Sung-Mo (Steve)

• Engineering, Electronics and Electrical

Language dc:language

eng

Identifier

(MiAaPQ)AAI3017040

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/80705