{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/80705"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/80705","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Modeling and Simulation of Integrated Microstructures and Systems","abstract":"To overcome the shortcomings of the above mentioned approaches, the goal of our research is to develop accurate computer-aided design tools and integrated design flow methodologies that provide orders-of-magnitude reduction in design and simulation cycle time; thus the cost of integrated microsystems. We have developed (i) automatic nonlinear model-order reduction methods to develop accurate behavioral models for MEMS devices; (ii) electrical modeling of MEMS devices; and (iii) an event-driven multilevel simulation environment to enable complete simulation of mixed-signal and mixed-technology integrated microsystems. These developments will allow microsystem simulation to be both fast and accurate. Design time will be decreased with quality improvement. System functionality and performance can be verified before committing to fabrication, thereby minimizing design iterations.","abstract_html":"To overcome the shortcomings of the above mentioned approaches, the goal of our research is to develop accurate computer-aided design tools and integrated design flow methodologies that provide orders-of-magnitude reduction in design and simulation cycle time; thus the cost of integrated microsystems. We have developed (i) automatic nonlinear model-order reduction methods to develop accurate behavioral models for MEMS devices; (ii) electrical modeling of MEMS devices; and (iii) an event-driven multilevel simulation environment to enable complete simulation of mixed-signal and mixed-technology integrated microsystems. These developments will allow microsystem simulation to be both fast and accurate. Design time will be decreased with quality improvement. System functionality and performance can be verified before committing to fabrication, thereby minimizing design iterations.","abstract_has_math":false,"creators":["Chen, Jinghong"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Electrical Engineering","degree_department":null,"school":null,"contributors":["Kang, Sung-Mo (Steve)"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-09-25T20:07:43Z","date_published":"2015-09-25T20:07:43Z","updated_at":"2026-07-22T22:26:14Z","subjects":["Engineering, Electronics and Electrical"],"languages":["eng"],"rights":[],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["(MiAaPQ)AAI3017040"],"render_values":[{"text":"(MiAaPQ)AAI3017040","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/80705","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Kang, Sung-Mo (Steve)"]},{"key":"dc:creator","label":"Author","values":["Chen, Jinghong"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-09-25T20:07:43Z","10000-01-01","2001"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Electrical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Engineering, Electronics and Electrical"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/80705","(MiAaPQ)AAI3017040"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["To overcome the shortcomings of the above mentioned approaches, the goal of our research is to develop accurate computer-aided design tools and integrated design flow methodologies that provide orders-of-magnitude reduction in design and simulation cycle time; thus the cost of integrated microsystems. We have developed (i) automatic nonlinear model-order reduction methods to develop accurate behavioral models for MEMS devices; (ii) electrical modeling of MEMS devices; and (iii) an event-driven multilevel simulation environment to enable complete simulation of mixed-signal and mixed-technology integrated microsystems. These developments will allow microsystem simulation to be both fast and accurate. Design time will be decreased with quality improvement. System functionality and performance can be verified before committing to fabrication, thereby minimizing design iterations.","Made available in DSpace on 2015-09-25T20:07:43Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3017040.pdf: 6195879 bytes, checksum: 5dd27d6de0e353b809d690c2a13f699e (MD5) Previous issue date: 2001","Embargo set by: Seth Robbins for item 81987 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","U of I Only","147 p.","Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001."]},{"key":"dc:title","label":"Title","values":["Modeling and Simulation of Integrated Microstructures and Systems"]}]}],"canonical_facts":{"dc:contributor":["Kang, Sung-Mo (Steve)"],"dc:creator":["Chen, Jinghong"],"dc:date":["2015-09-25T20:07:43Z","10000-01-01","2001"],"dc:description":["To overcome the shortcomings of the above mentioned approaches, the goal of our research is to develop accurate computer-aided design tools and integrated design flow methodologies that provide orders-of-magnitude reduction in design and simulation cycle time; thus the cost of integrated microsystems. We have developed (i) automatic nonlinear model-order reduction methods to develop accurate behavioral models for MEMS devices; (ii) electrical modeling of MEMS devices; and (iii) an event-driven multilevel simulation environment to enable complete simulation of mixed-signal and mixed-technology integrated microsystems. These developments will allow microsystem simulation to be both fast and accurate. Design time will be decreased with quality improvement. System functionality and performance can be verified before committing to fabrication, thereby minimizing design iterations.","Made available in DSpace on 2015-09-25T20:07:43Z (GMT). No. of bitstreams: 2 license.txt: 4848 bytes, checksum: 96035ab3f5e1c23cc7138a224ce498bd (MD5) 3017040.pdf: 6195879 bytes, checksum: 5dd27d6de0e353b809d690c2a13f699e (MD5) Previous issue date: 2001","Embargo set by: Seth Robbins for item 81987 Lift date: Forever Reason: Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","Restricted to the U of I community idenfinitely during batch ingest of legacy ETDs","U of I Only","147 p.","Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001."],"dc:identifier":["http://hdl.handle.net/2142/80705","(MiAaPQ)AAI3017040"],"dc:language":["eng"],"dc:subject":["Engineering, Electronics and Electrical"],"dc:title":["Modeling and Simulation of Integrated Microstructures and Systems"],"dc:type":["text"],"thesis:degree_discipline":["Electrical Engineering"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Ph.D."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:26:14Z"}