A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry

This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Mechanical Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Yang, Zining

Contributors dc:contributor

• Kim, Seok

• transfer printing
• micro-masonry
• microassembly
• microscanner
• micromirror

Statement dc:rights

• Copyright 2014 Zining Yang

Handle dc:identifier

http://hdl.handle.net/2142/79022

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/79022