{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/79022"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/79022","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry","abstract":"This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated.","abstract_html":"This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated.","abstract_has_math":false,"creators":["Yang, Zining"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"M.S.","degree_level":"Thesis","degree_discipline":"Mechanical Engineering","degree_department":null,"school":null,"contributors":["Kim, Seok"],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2015,"date_issued":"2015-08-07T21:28:26Z","date_published":"2015-08-07T21:28:26Z","updated_at":"2026-07-22T22:26:12Z","subjects":["transfer printing","micro-masonry","microassembly","microscanner","micromirror"],"languages":[],"rights":["Copyright 2014 Zining Yang"],"rights_urls":[],"identifier_entries":[]},"links":{"outbound_url":"http://hdl.handle.net/2142/79022","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Kim, Seok"]},{"key":"dc:creator","label":"Author","values":["Yang, Zining"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2015-08-07T21:28:26Z","2017-08-08T09:15:24Z","2014-12","2014-12-12"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Mechanical Engineering"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Thesis"]},{"key":"thesis:degree_name","label":"Degree Name","values":["M.S."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["transfer printing","micro-masonry","microassembly","microscanner","micromirror"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:rights","label":"Dc Rights","values":["Copyright 2014 Zining Yang"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["http://hdl.handle.net/2142/79022"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated."]},{"key":"dc:format","label":"Dc Format","values":["application/pdf"]},{"key":"dc:title","label":"Title","values":["A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry"]}]}],"canonical_facts":{"dc:contributor":["Kim, Seok"],"dc:creator":["Yang, Zining"],"dc:date":["2015-08-07T21:28:26Z","2017-08-08T09:15:24Z","2014-12","2014-12-12"],"dc:description":["This thesis presents the design, analytical and numerical modeling, fabrication and characterization of a hybrid tip-tilt-piston micromirror driven by electrostatic actuation. The micromirror involves a single crystal silicon mirror and a conductive elastomeric universal joint which are mechanically bonded and electrically interconnected. This device takes advantage of two distinct materials to achieve a high quality reflective surface using single crystal silicon and a highly flexible joint using an elastomer. To realize this hybrid system, micro-masonry techniques are employed such that silicon and elastomer parts are fabricated separately and integrated afterwards. The static and dynamic behaviors of the micromirror are characterized, indicating identical response about its two orthogonal scanning axes. Furthermore, the piston stroke utilized by the compressive deformation of the elastomeric joint along z-axis is investigated."],"dc:format":["application/pdf"],"dc:identifier":["http://hdl.handle.net/2142/79022"],"dc:rights":["Copyright 2014 Zining Yang"],"dc:subject":["transfer printing","micro-masonry","microassembly","microscanner","micromirror"],"dc:title":["A tip-tilt-piston micromirror with elastomeric universal joint fabricated via micro-masonry"],"dc:type":["text"],"thesis:degree_discipline":["Mechanical Engineering"],"thesis:degree_level":["Thesis"],"thesis:degree_name":["M.S."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:26:12Z"}