Silicon microplasma devices as real-time sensors of bulk plasma

Silicon microcavity devices have been demonstrated to exhibit photodetection capabilities. This thesis explores the possibility of using silicon microcavity devices as passive photodetectors for bulk plasma to serve as a diagnostic tool. The voltage-current characteristics of the device show that there is an interesting phenomenon that needs to be replicated with different types of devices to confirm what is occurring during operation. The discussion provides further insight on possible explanations for the voltage-current characteristics.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Electrical & Computer Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2015

Author dc:creator

• Choi, Dong San

Contributors dc:contributor

• Eden, James G.

• microplasma
• silicon microcavity device
• photodetection

Statement dc:rights

• Copyright 2014 Dong San Choi

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/72813

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/72813