{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/72813"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/72813","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Silicon microplasma devices as real-time sensors of bulk plasma","abstract":"Silicon microcavity devices have been demonstrated to exhibit photodetection capabilities. This thesis explores the possibility of using silicon microcavity devices as passive photodetectors for bulk plasma to serve as a diagnostic tool. The voltage-current characteristics of the device show that there is an interesting phenomenon that needs to be replicated with different types of devices to confirm what is occurring during operation. 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