Computational Design of Interference Lithography for the Fabrication of Three-Dimensional Microstructures

The fabrication of three-dimensional periodic (3D) micro- and nano-structures has become increasingly important to various fields in science and technology. This has been especially true for the field of photonic crystals (PCs): the study of artificially structured materials that manipulate light through their periodicity. The benefits obtained from creating tailored structures at these length-scales have fueled a growing effort to fabricate them. An important class of 3D microfabrication techniques, called interference lithography (IL), enables a wide variety of periodic microstructures through optical means. The focus of this work has been to develop and experimentally validate a computational approach to the design of IL experiments.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Materials Science and Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2014

Author dc:creator

• Rinne, James William

Contributors dc:contributor

• Wiltzius, Pierre

• Engineering, Materials Science

Identifier

(UMI)AAI3392454

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/72166