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University of Illinois at Urbana-Champaign

Halogen-Induced Semiconductor Surface Modifications

Abstract

dc:description

116 p.

Degree

thesis:*
Name thesis:degree_name
Ph.D.
Level thesis:degree_level
Dissertation
Discipline thesis:degree_discipline
Materials Science and Engineering
Grantor
University of Illinois at Urbana-Champaign
Year dc:date
2014

Author and committee

dc:creator, dc:contributor.*
Author dc:creator
  • Agrawal, Abhishek
Contributors dc:contributor
  • Weaver, John H.

Subjects

dc:subject × 1

Identifiers

dc:identifier.*
Identifier
(UMI)AAI3314715
OAI identifier oai:identifier
oai:www.ideals.illinois.edu:2142/72159

Chain of custody

source
Harvested from
University of Illinois - Urbana-Champaign
Base URL
www.ideals.illinois.edu/oai-pmh
Last updated
2026-07-22
Source record
OAI-PMH GetRecord
citation

Agrawal, Abhishek. Halogen-Induced Semiconductor Surface Modifications. Dissertation thesis, University of Illinois at Urbana-Champaign, 2014. http://hdl.handle.net/2142/72159