Depth Profiling in Thin Films via Waveguide Spectroscopy

A novel optical depth profiling technique is developed to depth profile thin optically transparent films which can be fabricated in the form of an asymmetric slab optical waveguide. Various methods for depth profiling thin dielectric films are also reviewed in a manner which illustrates the utility and limitations of depth profiling. The general theory of wave-guiding is also reviewed and then extended to develop the theory of depth profiling in homogeneous waveguides. Depth profiling is achieved by observing Raman spectroscopic signals due to the dopant from different waveguide modes. These signals contain information on the dopant distribution because the excitation spatial distribution is different from each mode.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Chemistry

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2014

Author dc:creator

• Miller, Daniel Robert

Contributors dc:contributor

• Bohn, Paul W.

• Chemistry, Analytical

Identifier

(UMI)AAI8815390

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/70402