Back to results
University of Illinois at Urbana-Champaign
Experimental and Theoretical Investigation of Electrochemical Pattern Etching
Abstract
dc:descriptionManufacturing of Integrated Circuits and Printed Circuit Boards involves a series of processing steps such as, lithography deposition and etching. The reliability of micro-electronic devices relies mainly on the ability to retain pattern fidelity during etching.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Chemical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2014
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Deligianni, Hariklia
- Contributors dc:contributor
-
- Alkire, Richard C.
Subjects
dc:subject × 2Identifiers
dc:identifier.*- Identifier
- (UMI)AAI8908663
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/69797