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University of Illinois at Urbana-Champaign
Experimental Studies of Laterally Seeded Recrystallized Polysilicon on Silicon Dioxide
Abstract
dc:descriptionSingle crystal silicon films have been grown on silicon dioxide covered silicon substrates by lateral epitaxy by seeded solidification using a scanned graphite strip heater.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Electrical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 1983
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Banerjee, Sanjay Kumar
Subjects
dc:subject × 1Identifiers
dc:identifier.*- Identifier
- (UMI)AAI8409857
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/69270