The Properties of Indium Gallium Antimonide Thin Films Deposited by Multitarget Rf Sputtering

Wickersham, Charles Edward, Jr.

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University of Illinois at Urbana-Champaign

The Properties of Indium Gallium Antimonide Thin Films Deposited by Multitarget Rf Sputtering

dc:creator Wickersham, Charles Edward, Jr.

thesis:degree_name Ph.D.

dc:date2014

Abstract

dc:description

Made available in DSpace on 2014-12-14T16:00:40Z (GMT). No. of bitstreams: 1 7913651.pdf: 9875434 bytes, checksum: 2fc1678efef1e2e207007c07fcfd73ff (MD5) Previous issue date: 1978

Degree

thesis:*

Name thesis:degree_name: Ph.D.
Level thesis:degree_level: Dissertation
Discipline thesis:degree_discipline: Metallurgical Engineering
Grantor: University of Illinois at Urbana-Champaign
Year dc:date: 2014

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Wickersham, Charles Edward, Jr.

Subjects

dc:subject × 1

Engineering, Metallurgy

Rights

Language dc:language: eng

Identifiers

dc:identifier.*

Identifier: (UMI)AAI7913651
OAI identifier oai:identifier: oai:www.ideals.illinois.edu:2142/68636

Chain of custody

source

Harvested from: University of Illinois - Urbana-Champaign
Base URL: www.ideals.illinois.edu/oai-pmh
Last updated: 2026-07-22
Source record: OAI-PMH GetRecord

related terms

citation

Wickersham, Charles Edward, Jr.. The Properties of Indium Gallium Antimonide Thin Films Deposited by Multitarget Rf Sputtering. Dissertation thesis, University of Illinois at Urbana-Champaign, 2014. http://hdl.handle.net/2142/68636

The Properties of Indium Gallium Antimonide Thin Films Deposited by Multitarget Rf Sputtering

Abstract

Degree

Author and committee

Subjects

Rights

Identifiers

Chain of custody

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