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Showing 1 to 20 of 28 for “"RF sputtering"”.
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Deposition of tantalum thin films by RF sputtering with substrate bias
… bombardment on the crystallographic structure of RF sputtered tantalum thin films on different substrates, particularly aluminum and silicon, have been studied. The effect of substrate biasing on ion current and film thickness has been investigated. The study included comparison between substrate …
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Novel saturable absorber devices grown using RF and magnetron RF sputtering
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
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Optimisation and fabrication of ultra violet emitting CuC1 thin films by RF sputtering
… with Si. In this thesis, growth of CuCl using RF magnetron sputtering is investigated in detail. Stoichiometry and microstructure are the two major deciding factors for the UV emission from the film. We have successfully controlled both these properties by varying the sputtering parameters. …
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The Properties of Indium Gallium Antimonide Thin Films Deposited by Multitarget Rf Sputtering
Made available in DSpace on 2014-12-14T16:00:40Z (GMT). No. of bitstreams: 1 7913651.pdf: 9875434 bytes, checksum: 2fc1678efef1e2e207007c07fcfd73ff (MD5) Previous issue date: 1978
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The Electronic and Metallurgical Properties of Amorphous Silicon Thin Films Deposited by Rf Sputtering
Made available in DSpace on 2014-12-14T16:00:29Z (GMT). No. of bitstreams: 1 7606869.pdf: 5934455 bytes, checksum: 3446e5250f7676f3b661c1f770e0f359 (MD5) Previous issue date: 1975
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Fabrication and characterization of Phosphate-based planar waveguides activated by Er3+ ions
… activated by rare earth ions both by sol-gel and RF-sputtering techniques. The objective of this thesis has been to evaluate various methodologies for fab-rication Phosphorous-based planar waveguides. In this context sol-gel and RF-sputtering techniques for planar waveguides fabrication has been …
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Development and application of saturable absorbers to femtosecond solid-state laser mode-locking
… molecular beam epitaxy and non-epitaxially using RF sputtering. In this thesis, the development and application of both types of saturable absorbers to self-starting mode-locking in solid-state lasers was examined. The first part of this thesis describes the use of an epitaxially grown saturable …
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Texture evolution in metal nitride (aluminum nitride, titanium nitride, hafnium nitride) thin films prepared by off-normal incidence reactive magnetron sputtering
… by off-normal incidence reactive magnetron sputtering at room temperature in N2/Ar mixtures. Texture measurements were performed by x-ray pole figure analysis of the (0002) (AlN), (111) and (200) (TiN and HfN) diffraction peaks. We report a strong dependence of fiber texture tilt angle on …
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Tribology and Micro-Chemistry of Sputter Deposited Composite Coatings on Honed Steel Substrates
… wear resistant coatings (TiC) were deposited by rf sputtering using a dc substrate bias and the solid lubricant coatings (TiO(,2)) were deposited in an Ar and O(,2) mixed rf glow discharge. Chemically honed steel substrates which consisted of a checkerboard of raised squares separated by 1.5 …
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Fabrication and Characterization of Silicon Rich Oxide (SRO) Thin Film Deposited by Plasma Enhanced CVD for Si Quantum Dot
… Si QD materials are generally fabricated by RF-Sputtering followed by high temperature solid-phase crystallization. According to the results of former researchers [9,44], the poor film quality of sputtered films might be responsible for the low conductivity and lifetime of the films hindering …
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Electron beam interactive oxide films for nanometer scale lithography
A number of oxide thin films produced by rf sputtering have been found to show high resolution lithographic characteristics when exposed under high dose rate conditions in a scanning transmission electron microscope. Holes and lines less than 10 nm in dimensions have been formed in amorphous films …
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Growth Study and Characterization of TiO2 Based Thin Films for Low Temperature Synthesis of Transparent Conductive Films
… co-doping. TNO films were deposited by RF sputtering on various substrates including glass, silicon and Kapton polyimide under different plasma power conditions in Ar and Ar-O2 discharge. Two types of niobium containing targets, Nb metal and Nb2O5 oxide were employed simultaneously with …
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Advanced Synthesis of Ultra-High Temperature Ceramics (UHTCs) and High Temperature Electron Emitting Materials
… emitting materials was reduced to improved performance. A reduction of W_f in multicomponent hexaborides was achieved by doping with highly electropositive Ba, which enhances electron emission. Single-phase bulk multicomponent polycrystalline hexaborides of La0.5Ba0.5B6, Ce0.5Ba0.5B6, and BaB6 …
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Edible photonic crystals tunable within the visible regime
An experimental study was performed to design and fabricate an edible photonic crystal made of alternating layers of food grade titanium dioxide and agar that is able to selectively reflect wavelengths of light within the visible spectrum and allow for dynamic color changes through the tuning …
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The Growth of Copper - Chromium Metastable Alloys by Bias Sputtering: Effect of Substrate Bias and Alloy Composition on Solubility and Morphology
… alloys have been successfully grown by bias rf sputtering. The effect of substrate bias and film composition on the early stages of film growth, on the film microstructure and morphology, and on the phase transformation process of the metastable films were studied using (S)TEM, SEM, AES, …
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Preparation And Characterization Of Cigss Solar Cells And Pv Module Data Analysis
… ZnO:Al was deposited on the CIGSS films using RF sputtering. A separate LABVIEW program was written to automate the process of ZnO:Al deposition. Ni/Al contact fingers were deposited on the ZnO:Al layer using the e-beam evaporation technique. Further, in order to test these solar cells …
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INVESTIGATION OF THE STRUCTURAL PROPERTIES OF HAFNIUM ZIRCONIUM OXIDE THIN FILMS
… SiO2 were prepared using radio-frequency (RF) sputtering and hybrid RF-pulsed laser deposition. Analysis by synchrotron grazing incidence X-ray diffraction (GIXRD) revealed that most samples contained only the monoclinic phase with fiber texture along the [1-1-1]/[11-1] axis, with the …
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Microstructural Development and Superconducting Parameters of the YBa2Cu3O7-delta Coated Conductor
… has been deposited onto Pd-buffered NiFe by DC sputtering and very sharp cube texture is obtained. Ceramic buffer layers, CeO2 and YSZ, have been deposited by RF sputtering, though an undesirable (111) oriented component accompanies the cube textured material. Also a technique has been developed …
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Annealing for intrinsic point-defect control and enhanced solar cell performance : the case of H₂S and tin sulfide (SnS)
… terawatt level. Growth of SnS is explored using RF sputtering and thermal evaporation. Thermal evaporation yielded phase pure films and a SnS solar cell device stack was developed using a ZnOxSy film as the n-type buffer layer. It is hypothesized that annealing in H₂S/H₂ gas mixtures will improve …
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A parallel branch-and-bound algorithm for thin-film optical systems, with application to realizing a broadband omnidirectional antireflection coating for silicon solar cells
… The design is experimentally validated using RF sputtering, and shows performance that is competitive with existing solutions based on impractical sophisticated nano-deposition techniques, as well as the more practical but also more narrowly applicable solutions based on texturing. This makes …
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