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University of Illinois at Urbana-Champaign
Atomic and Electrical Profile Studies of Ion-Implanted Semiconductors
Abstract
dc:descriptionMade available in DSpace on 2014-12-12T20:54:55Z (GMT). No. of bitstreams: 1 7913542.pdf: 3858567 bytes, checksum: 275f800d91f341d776f2c8635e227a4d (MD5) Previous issue date: 1978
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Electrical Engineering
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2014
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Marcyk, Gerald Twiggs
Subjects
dc:subject × 1Rights
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
- (UMI)AAI7913542
- OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/66188