Flexible/stretchable strain gauges based on single-crystalline silicon for biomedical applications

Advancement in the semiconductor materials, mechanics and fabrication techniques enable the use of conventional wafer based electronics in unconventional ways via bio-integration. Tissue deformations as a vital sign are conventionally monitored through imaging technologies such as MRI. Strain gauges with equal or greater mechanical compliance are required to measure strains in soft substances, for instance, the human body. This thesis presents tissue-like soft strain gauges through successful integration of metal or silicon nanomembranes on thin flexible and stretchable substrates. Flexible metal strain gauge systems demonstrate high flexibility with low gauge factors, whereas flexible strain gauge systems based on semiconductor materials such as silicon exhibit high gauge factor attributing to their piezoresistive properties on both flexible and stretchable substrates. Innovative applications of high-performance flexible/stretchable strain gauges are demonstrated, including breath monitoring through chest motion detection, ischemia detection through heart motion monitoring, and so on. Tissue-like strain gauges have opened up a new chapter of low cost, high precision in vivo bio-strain quantification.

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Materials Science & Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2013

Author dc:creator

• Ameen, Abid

Contributors dc:contributor

• Rogers, John A.

• flexible electronics
• stretchable electronics
• semiconductor nanomaterials
• implanted biomedical devices
• single-crystalline silicon sensor
• strain gauge.

Statement dc:rights

• Copyright 2013 Abid Ameen

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/44793

OAI record oai:identifier

https://www.ideals.illinois.edu/oai-pmh?verb=GetRecord&metadataPrefix=etdms&identifier=oai%3Awww.ideals.illinois.edu%3A2142%2F44793