Effect of low energy ion irradiation during growth on the composition, nanostructure, and physical properties of epitaxial metastable zirconium aluminum nitride

Item withdrawn by Mark Zulauf (zulauf@illinois.edu) on 2012-10-15T19:00:24Z Item was in collections: University of Illinois Theses & Dissertations (ID: 1) No. of bitstreams: 1 Master Dissertation.pdf: 23101363 bytes, checksum: c35d98278c93a599d3b071276046859a (MD5)

Name thesis:degree_name

M.S.

Level thesis:degree_level

Thesis

Discipline thesis:degree_discipline

Materials Science & Engr

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2013

Author dc:creator

• Mei, Antonio Rodolph

Contributors dc:contributor

• Rockett, Angus A.

• transition metal nitride
• metastable alloy
• spinodal decomposition
• nanostructure
• ion bombardment
• reactive magnetron sputtering

Statement dc:rights

• Copyright 2012 Antonio Rodolph Mei

Language dc:language

en

Handle dc:identifier

http://hdl.handle.net/2142/42357

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/42357