Effect of low energy ion irradiation during growth on the composition, nanostructure, and physical properties of epitaxial metastable zirconium aluminum nitride

Mei, Antonio Rodolph

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University of Illinois at Urbana-Champaign

Effect of low energy ion irradiation during growth on the composition, nanostructure, and physical properties of epitaxial metastable zirconium aluminum nitride

dc:creator Mei, Antonio Rodolph

thesis:degree_name M.S.

dc:date2013

Degree

thesis:*

Name thesis:degree_name: M.S.
Level thesis:degree_level: Thesis
Discipline thesis:degree_discipline: Materials Science & Engr
Grantor: University of Illinois at Urbana-Champaign
Year dc:date: 2013

Author and committee

dc:creator, dc:contributor.*

Author dc:creator: Mei, Antonio Rodolph
Contributors dc:contributor: Rockett, Angus A.

Subjects

dc:subject × 6

Rights

dc:rights

Statement dc:rights: Copyright 2012 Antonio Rodolph Mei
Language dc:language: en

Identifiers

dc:identifier.*

Handle dc:identifier: http://hdl.handle.net/2142/42357
OAI record oai:identifier: https://www.ideals.illinois.edu/oai-pmh?verb=GetRecord&metadataPrefix=etdms&identifier=oai%3Awww.ideals.illinois.edu%3A2142%2F42357

Chain of custody

source

Harvested from: University of Illinois - Urbana-Champaign
Base URL: www.ideals.illinois.edu/oai-pmh
Last updated: 2026-07-22
Source record: OAI-PMH GetRecord

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citation

Mei, Antonio Rodolph. Effect of low energy ion irradiation during growth on the composition, nanostructure, and physical properties of epitaxial metastable zirconium aluminum nitride. Thesis thesis, University of Illinois at Urbana-Champaign, 2013. http://hdl.handle.net/2142/42357

Effect of low energy ion irradiation during growth on the composition, nanostructure, and physical properties of epitaxial metastable zirconium aluminum nitride

Degree

Author and committee

Subjects

Rights

Identifiers

Chain of custody

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