Chemical evolution, heteroepitaxy, and monolayer patterning of solution-derived lithium niobate thin layers

Integrated lithium niobate (LiNbO$\sb3$) thin films are of technical interest for frequency doubling and a variety of efficient photonic circuit element applications. Solution deposition of such films on near lattice-matched substrates has been conducted, allowing low temperature processing, stoichiometry control, doping capability, and waveguiding analysis of heteroepitaxial thin layers. The structural evolution, optical properties, and device patterning of such films are reported in this thesis.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Engineering, Electronics and Electrical

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Clem, Paul G.

Contributors dc:contributor

• Payne, David A.

• Engineering, Electronics and Electrical
• Engineering, Materials Science

Statement dc:rights

• Copyright 1996 Clem, Paul G.

Language dc:language

eng

Identifier

9780591197761
AAI9712235
(UMI)AAI9712235

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/23715