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University of Illinois at Urbana-Champaign
Investigation of an electron-beam sustained discharge in helium
Abstract
dc:descriptionResults of an experimental and theoretical investigation into an Electron-Beam Sustained Discharge (EBSD) confined within an electrically insulating cylindrical discharge tube are presented. The study is directed toward discharges in helium where radial ambipolar diffusion is the dominant plasma loss mechanism. This investigation is made in support of a continuing, technology-driven program to apply the unique attributes of the EBSD to plasma processing applications in the growth and etching of thin films.
Degree
thesis:*- Name thesis:degree_name
- Ph.D.
- Level thesis:degree_level
- Dissertation
- Discipline thesis:degree_discipline
- Physics, Fluid and Plasma
- Grantor
- University of Illinois at Urbana-Champaign
- Year dc:date
- 2011
Author and committee
dc:creator, dc:contributor.*- Author dc:creator
-
- Schatz, Kenneth David
- Contributors dc:contributor
-
- Ruzic, David N.
Subjects
dc:subject × 1Rights
dc:rights- Statement dc:rights
-
- Copyright 1995 Schatz, Kenneth David
- Language dc:language
- eng
Identifiers
dc:identifier.*- Identifier
-
AAI9624483
(UMI)AAI9624483 - OAI identifier oai:identifier
- oai:www.ideals.illinois.edu:2142/22977