{"id":{"repo_id":"uiuc","oai_identifier":"oai:www.ideals.illinois.edu:2142/22977"},"canonical_url":"https://search.dev.ndltd.org/etd/uiuc/oai:www.ideals.illinois.edu:2142/22977","repository":{"repo_id":"uiuc","name":"University of Illinois - Urbana-Champaign","base_url":"https://www.ideals.illinois.edu/oai-pmh"},"display":{"title":"Investigation of an electron-beam sustained discharge in helium","abstract":"Results of an experimental and theoretical investigation into an Electron-Beam Sustained Discharge (EBSD) confined within an electrically insulating cylindrical discharge tube are presented. The study is directed toward discharges in helium where radial ambipolar diffusion is the dominant plasma loss mechanism. This investigation is made in support of a continuing, technology-driven program to apply the unique attributes of the EBSD to plasma processing applications in the growth and etching of thin films.","abstract_html":"Results of an experimental and theoretical investigation into an Electron-Beam Sustained Discharge (EBSD) confined within an electrically insulating cylindrical discharge tube are presented. The study is directed toward discharges in helium where radial ambipolar diffusion is the dominant plasma loss mechanism. This investigation is made in support of a continuing, technology-driven program to apply the unique attributes of the EBSD to plasma processing applications in the growth and etching of thin films.","abstract_has_math":false,"creators":["Schatz, Kenneth David"],"institution":"University of Illinois at Urbana-Champaign","degree_name":"Ph.D.","degree_level":"Dissertation","degree_discipline":"Physics, Fluid and Plasma","degree_department":null,"school":null,"contributors":["Ruzic, David N."],"advisors":[],"committee_chairs":[],"committee_members":[],"year":2011,"date_issued":"2011-05-07T13:57:49Z","date_published":"2011-05-07T13:57:49Z","updated_at":"2026-07-22T22:25:21Z","subjects":["Physics, Fluid and Plasma"],"languages":["eng"],"rights":["Copyright 1995 Schatz, Kenneth David"],"rights_urls":[],"identifier_entries":[{"key":"dc:identifier","label":"Identifier","values":["AAI9624483","(UMI)AAI9624483"],"render_values":[{"text":"AAI9624483","href":null,"code":true},{"text":"(UMI)AAI9624483","href":null,"code":true}]}]},"links":{"outbound_url":"http://hdl.handle.net/2142/22977","outbound_label":"Handle","outbound_source":"dc:identifier"},"metadata_groups":[{"id":"people","label":"People","entries":[{"key":"dc:contributor","label":"Contributor","values":["Ruzic, David N."]},{"key":"dc:creator","label":"Author","values":["Schatz, Kenneth David"]}]},{"id":"academic_context","label":"Academic Context","entries":[{"key":"dc:date","label":"Dc Date","values":["2011-05-07T13:57:49Z","10000-01-01","1995"]},{"key":"dc:type","label":"Dc Type","values":["text"]},{"key":"thesis:degree_discipline","label":"Discipline","values":["Physics, Fluid and Plasma"]},{"key":"thesis:degree_level","label":"Degree Level","values":["Dissertation"]},{"key":"thesis:degree_name","label":"Degree Name","values":["Ph.D."]},{"key":"thesis:institution_name","label":"Thesis Institution Name","values":["University of Illinois at Urbana-Champaign"]}]},{"id":"subjects_keywords","label":"Subjects and Keywords","entries":[{"key":"dc:subject","label":"Dc Subject","values":["Physics, Fluid and Plasma"]}]},{"id":"language_rights","label":"Language and Rights","entries":[{"key":"dc:language","label":"Dc Language","values":["eng"]},{"key":"dc:rights","label":"Dc Rights","values":["Copyright 1995 Schatz, Kenneth David"]}]},{"id":"identifiers","label":"Identifiers","entries":[{"key":"dc:identifier","label":"Identifier","values":["AAI9624483","(UMI)AAI9624483","http://hdl.handle.net/2142/22977"]}]},{"id":"additional","label":"Additional Metadata","entries":[{"key":"dc:description","label":"Description","values":["Results of an experimental and theoretical investigation into an Electron-Beam Sustained Discharge (EBSD) confined within an electrically insulating cylindrical discharge tube are presented. The study is directed toward discharges in helium where radial ambipolar diffusion is the dominant plasma loss mechanism. This investigation is made in support of a continuing, technology-driven program to apply the unique attributes of the EBSD to plasma processing applications in the growth and etching of thin films.","Results of an electron-fluid model, including predictions of electron temperature, electric field strength within the discharge, and electron density, are presented for a range of helium densities between 1.0E15 and 1.0E16 #/cm$\\sp3$, discharge tube radii from 1.0 to 10.0 cm, electron-beam energy deposition rates in the neighborhood of 1.0E16 eV/sec/cc, and glow discharge currents from 0.0 to 250. mA. Modeling predictions are compared with experimental measurements of an EBSD. A majority of the experimental data presented are for the case of an EBSD in 0.25 Torr helium and a discharge tube of radius 3.65 cm with a beam energy deposition rate of approximately 1.3E16 eV/sec/cc and glow discharge currents between 0.0 and 185 mA. Modeling results are shown to display all of the trends seen in the experimental data, except that of the electron density when the electron temperature is low. It is argued that this effect is due to the over-abundance of high-energy electrons, relative to a Maxwell-Boltzmann distribution, that is inherent in electron-beam-driven plasmas.","Made available in DSpace on 2011-05-07T13:57:49Z (GMT). No. of bitstreams: 2 license.txt: 4922 bytes, checksum: 910b249b4beec47e7ab768910c8f966f (MD5) 9624483.pdf: 7345777 bytes, checksum: 35fcdb2f84da922659186b7eb4185db4 (MD5) Previous issue date: 1995","Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by Howard Ding (hding2@illinois.edu) on 2011-05-07T15:01:19Z Item is restricted indefinitely.","Restriction data tranferred 2014-07-01T11:29:05-05:00 Original Data Group with Access UIUC Users [automated] Release Date: none Reason: ETDs are only available to UIUC Users without author permission","ETDs are only available to UIUC Users without author permission","U of I Only"]},{"key":"dc:title","label":"Title","values":["Investigation of an electron-beam sustained discharge in helium"]}]}],"canonical_facts":{"dc:contributor":["Ruzic, David N."],"dc:creator":["Schatz, Kenneth David"],"dc:date":["2011-05-07T13:57:49Z","10000-01-01","1995"],"dc:description":["Results of an experimental and theoretical investigation into an Electron-Beam Sustained Discharge (EBSD) confined within an electrically insulating cylindrical discharge tube are presented. The study is directed toward discharges in helium where radial ambipolar diffusion is the dominant plasma loss mechanism. This investigation is made in support of a continuing, technology-driven program to apply the unique attributes of the EBSD to plasma processing applications in the growth and etching of thin films.","Results of an electron-fluid model, including predictions of electron temperature, electric field strength within the discharge, and electron density, are presented for a range of helium densities between 1.0E15 and 1.0E16 #/cm$\\sp3$, discharge tube radii from 1.0 to 10.0 cm, electron-beam energy deposition rates in the neighborhood of 1.0E16 eV/sec/cc, and glow discharge currents from 0.0 to 250. mA. Modeling predictions are compared with experimental measurements of an EBSD. A majority of the experimental data presented are for the case of an EBSD in 0.25 Torr helium and a discharge tube of radius 3.65 cm with a beam energy deposition rate of approximately 1.3E16 eV/sec/cc and glow discharge currents between 0.0 and 185 mA. Modeling results are shown to display all of the trends seen in the experimental data, except that of the electron density when the electron temperature is low. It is argued that this effect is due to the over-abundance of high-energy electrons, relative to a Maxwell-Boltzmann distribution, that is inherent in electron-beam-driven plasmas.","Made available in DSpace on 2011-05-07T13:57:49Z (GMT). No. of bitstreams: 2 license.txt: 4922 bytes, checksum: 910b249b4beec47e7ab768910c8f966f (MD5) 9624483.pdf: 7345777 bytes, checksum: 35fcdb2f84da922659186b7eb4185db4 (MD5) Previous issue date: 1995","Item marked as restricted to the 'UIUC Users [automated]' Group (id=2) by Howard Ding (hding2@illinois.edu) on 2011-05-07T15:01:19Z Item is restricted indefinitely.","Restriction data tranferred 2014-07-01T11:29:05-05:00 Original Data Group with Access UIUC Users [automated] Release Date: none Reason: ETDs are only available to UIUC Users without author permission","ETDs are only available to UIUC Users without author permission","U of I Only"],"dc:identifier":["AAI9624483","(UMI)AAI9624483","http://hdl.handle.net/2142/22977"],"dc:language":["eng"],"dc:rights":["Copyright 1995 Schatz, Kenneth David"],"dc:subject":["Physics, Fluid and Plasma"],"dc:title":["Investigation of an electron-beam sustained discharge in helium"],"dc:type":["text"],"thesis:degree_discipline":["Physics, Fluid and Plasma"],"thesis:degree_level":["Dissertation"],"thesis:degree_name":["Ph.D."],"thesis:institution_name":["University of Illinois at Urbana-Champaign"]},"updated_at":"2026-07-22T22:25:21Z"}