Preparation and characterization of metal/sapphire and metal/polyimide thin film laminates

The aim of this research program was to understand the effect of thermal cycling on metal/insulator (sapphire and polyimide, PI) thin film laminates through studies of microstructure and microchemistry. Systems studied were: Ti/sapphire, Au/Cu/Ti/PI/Si and Cr/Cu/Cr/PI/Si. In the Ti/sapphire system, there was an additional interest to understand the effect of growth temperature on growth orientation and crystal quality of the films. The three material systems were characterized by a number of analytical techniques such as cross-section TEM (XTEM), plan-view TEM, SEM, Auger Electron Spectroscopy and X-ray diffraction. Of these, XTEM was the most extensively used.

Name thesis:degree_name

Ph.D.

Level thesis:degree_level

Dissertation

Discipline thesis:degree_discipline

Materials Engineering

Grantor

University of Illinois at Urbana-Champaign

Year dc:date

2011

Author dc:creator

• Peddada, Satyanarayana Rao

Contributors dc:contributor

• Birnbaum, Howard K.

• Engineering, Metallurgy
• Engineering, Materials Science

Statement dc:rights

• Copyright 1991 Peddada, Satyanarayana Rao

Language dc:language

eng

Identifier

AAI9210950
(UMI)AAI9210950

OAI identifier oai:identifier

oai:www.ideals.illinois.edu:2142/21833